“…From then on, femtosecond laser was gradually noticed as a powerful tool in micromachining due to its excellent performance in high machining quality and precision [2], especially in solid materials ablation, i.e., ablate 2D structures on metals [3][4][5], polymers [6,7], and crystals [8,9]. Meanwhile, 2D photonic devices manufacturing [10,11], surface engineering [12][13][14][15] and the formation of novel polyynes, 1D molecular carbon wire [16], nanojoining [17,18], and casting [19] based on femtosecond laser irradiation are also well developed and attracted many scientific interests. Apart from the aforementioned 2D manufacturing applications of which functional features are fabricated either directly on the surface of the materials, or fabricated according to in-plane machining pattern, femtosecond laser micromachining is unique in its 3D micro-/nanostructuring ability attributing to the nonlinear nature of the multiphoton absorption [20][21][22]: (1) The structure changes can be confined to the focal volume as the intensity distribution for multiphoton absorption is spatially narrower than linear absorption, providing an ideal tool for 3D manufacturing with high spatial resolution; (2) the absorption of laser energy is independent with materials, ensuring its wide applications in various materials; and (3) no thermal effect occurs during femtosecond laser irradiation since the lattice heating time (*10 ps) is much longer than the pulse duration of femtosecond laser (\1 ps), and thus femtosecond laser machining is more precise than the fabrication with the lasers with longer pulse durations.…”