Fiber deflection probe for small hole metrology

Muralikrishnan, Balasubramanian; Stone, Jack A.; Stoup, John R.

doi:10.1016/j.precisioneng.2005.07.004

Cited by 85 publications

(62 citation statements)

References 11 publications

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“…However, it is very difficult to precisely measure the shapes of micro-holes that have large length/diameter (L/D) ratios because of the difficulties encountered during probe fabrication and the complexities involved in employing a sensing method that uses a small measuring force. Many studies have been reported on micro-hole measurement techniques employing a variety of probes such as optical probes [1][2][3], vibroscanning probes [4,5], vibrating probes [6][7][8][9][10][11][12], tunneling effect probes [12,13], opto-tactile probes [14], fiber probes [15,16], optical trapping probes [17], and diaphragm or flexure based probes using an elastic mechanism [18][19][20][21][22][23][24][25][26][27].…”

Section: Introductionmentioning

confidence: 99%

Development of Touch Probing System Using a Fiber Stylus

Murakami

Katsuki

Sajima

2016

Fibers

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This paper presents a system that can be used for micro-hole measurement; the system comprises an optical fiber stylus that is 5 µm in diameter. The stylus deflects when it comes into contact with the measured surface; this deflection is measured optically. In this study, the design parameters of the optical system are determined using a ray-tracing method, and a prototype of the probing system is fabricated to verify ray-tracing simulation results; furthermore, the performance of the system is evaluated experimentally. The results show that the design parameters of this system can be determined using ray-tracing; the resolution of the measurement system using this shaft was approximately 3 nm, and the practicality of this system was confirmed by measuring the shape of a micro-hole 100 µm in diameter and 475 µm in depth.

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Section: Introductionmentioning

confidence: 99%

Development of Touch Probing System Using a Fiber Stylus

Murakami

Katsuki

Sajima

2016

Fibers

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“…Accordingly, many micro-/nano-coordinate measuring machines (micro-/nano-CMMs) have been proposed to satisfy the urgent demand for the dimensional measurement of micro parts [1][2][3][4]. Many touch probing systems that can be equipped onto micro-/nano-CMMs have also been developed, such as (a) the capacitive probe that uses at least three high-precision capacitive sensors to detect the arm's displacement of the floating plate of the probe [5,6], (b) the strain gauge probe that adheres strain gauges on the membrane or cantilevers symmetrically to detect the ball tip's motion using the piezo-resistive effect [7][8][9][10], (c) the inductive probe that uses three high-precision inductive sensors and a complicated flexure hinges to construct the probe head [11], (d) the fiber probe that uses the imaging system to detect the ball tip's motion [12][13][14] or uses long Bragg gratings to detect the axial different optical principles to detect the probe motion, such as position detector, focus sensor, interferometer, auto-collimator, etc. [18][19][20][21][22][23][24][25][26].…”

Section: Introductionmentioning

confidence: 99%

Development of a High-Precision Touch-Trigger Probe Using a Single Sensor

Fan

et al. 2016

Applied Sciences

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Abstract:To measure various components with nano-scale precision, a new high-precision touch-trigger probe using a single low-cost sensor for a micro-coordinate measuring machine (CMM) is presented in this paper. The sensor is composed of a laser diode, a plane mirror, a focusing lens, and a quadrant photo detector (QPD). The laser beam from the laser diode with an incident angle is reflected by the plane mirror and then projected onto the quadrant photo detector (QPD) via the focusing lens. The plane mirror is adhered to the upper surface of the floating plate supported by an elastic mechanism, which can transfer the displacement of the stylus's ball tip in 3D to the plane mirror's vertical and tilt movement. Both motions of the plane mirror can be detected by respective QPDs. The probe mechanism was analyzed, and its structural parameters that conform to the principle of uniform sensitivity and uniform stiffness were obtained. The simulation result showed that the stiffness was equal in 3D and less than 1 mN/µm. Some experiments were performed to investigate the probe's characteristics. It was found that the probe could detect the trigger point with uniform sensitivity, a resolution of less than 5 nm, and a repeatability of less than 4 nm. It can be used as a touch-trigger probe on a micro/nano-CMM.

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“…Therefore, a longer travelling range of the probe positioning system is essential for the gap width measurement of the slot die. The effective working length of the shear-mode micro-probe is designed to be 1 mm, which is longer than that of the existing micro-probes [25,30], so that the inside of the micro-slit can be accessed by the probe tip while avoiding the influence of the chamfered edges of the precision parts forming the micro-slit. In order to shorten the measurement time, a measurement strategy of gap width measurement based on two probing points is also introduced.…”

Section: Introductionmentioning

confidence: 99%

A Micro-Coordinate Measurement Machine (CMM) for Large-Scale Dimensional Measurement of Micro-Slits

et al. 2016

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This paper presents a micro-coordinate measuring machine (micro-CMM) for large-scale dimensional measurement of a micro-slit on a precision die coater by using a shear-mode micro-probe. A glass micro sphere with a nominal diameter of 52.3 µm was attached on one end of a tapered glass capillary tube as a probe tip ball. The micro-slit width of a slot die coater with a nominal slit width of 85 µm was measured by the micro-CMM. The probe tip was placed in the slit for the measurement. The effective working length of the probe was confirmed experimentally to be at least 1 mm. In order to measure the gap width uniformity over the entire slot die length of 200 mm, an air-bearing linear slide with a travelling stroke of 300 mm was employed in the micro-CMM to position the probe along the length direction of the slot die. The angular alignment error and the motion error of the air-bearing linear slide as well as those of the stages for positioning the probe along the direction perpendicular to the length direction of the slot die were investigated for evaluation of the expanded uncertainty of gap width measurement.

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Fiber deflection probe for small hole metrology

Cited by 85 publications

References 11 publications

Development of Touch Probing System Using a Fiber Stylus

Development of Touch Probing System Using a Fiber Stylus

Development of a High-Precision Touch-Trigger Probe Using a Single Sensor

A Micro-Coordinate Measurement Machine (CMM) for Large-Scale Dimensional Measurement of Micro-Slits

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