2023
DOI: 10.3390/mi14081500
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Fiber-to-Chip Three-Dimensional Silicon-on-Insulator Edge Couplers with High Efficiency and Tolerance

Abstract: The edge coupler is an indispensable optical device for connecting an external fiber and on-chip waveguide. The coupling efficiency of the edge coupler affects the effective integration of optical circuits. In this study, three-dimensional (3D) edge couplers with high efficiency and tolerance are proposed. The high coupling efficiency of the 3D edge couplers is verified by theoretical calculations. Three couplers are fabricated on a thick-silicon platform via 3D grayscale lithography. At the 1550 nm band, the … Show more

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Cited by 5 publications
(1 citation statement)
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“…A spot size converter buried in the cladding can be composed of different polymers [48,49], with the most widely used being SU8 [50][51][52], amorphous silicon [53], and SiON materials [54,55]. In recent times, 3D-structure tapers have gained popularity, as highlighted in references [56][57][58]. Despite facing challenges such as losing Y symmetry and encountering fabrication issues, these tapers show low coupling losses.…”
Section: Vertical Multi-layer Edge Couplersmentioning
confidence: 99%
“…A spot size converter buried in the cladding can be composed of different polymers [48,49], with the most widely used being SU8 [50][51][52], amorphous silicon [53], and SiON materials [54,55]. In recent times, 3D-structure tapers have gained popularity, as highlighted in references [56][57][58]. Despite facing challenges such as losing Y symmetry and encountering fabrication issues, these tapers show low coupling losses.…”
Section: Vertical Multi-layer Edge Couplersmentioning
confidence: 99%