Fidelity test for through-focus or volumetric type of optical imaging methods

Abstract

Rapid increase in interest and applications of through-focus (TF) or volumetric type of optical imaging in biology and other areas has resulted in the development of several TF image collection methods. Achieving quantitative results from images requires standardization and optimization of image acquisition protocols. Several standardization protocols are available for conventional optical microscopy where a best-focus image is used, but to date, rigorous testing protocols do not exist for TF optical imaging. In this paper, we present a method to determine the fidelity of the TF optical data using the TF scanning optical microscopy images.

Multiple parametric nanoscale measurements with high sensitivity based on through‐focus scanning optical microscopy

“…Meanwhile, there is some mechanical noise from the piezo‐positioning system due to its vibration along the optical axis. A method to analyse the optical and mechanical noises in TSOM system was proposed by Attota (). For example, let us take the sample of the isolated Au line.…”

“…Because the through‐focus process is achieved by objective scanning, a certain aberration exists within the FOV during the scanning process, and the distribution of this aberration is related to the position of the FOV (Sohn et al ., ; Attota, ; Attota, ; Attota & Agocs, ). The existence of this aberration introduces optical noise in the system.…”

“…Most of the current literatures are on stage scanning methods (Attota et al ., ; Attota & Dixson, ; Attota et al ., ,b). Nevertheless, TSOM based upon stage scanning is strongly affected by mechanical noise, especially has issues in in‐line and in situ measurements (Attota, ). Studies on adaptive optics method have also been reported (Ryabko et al ., ; Lee et al ., ; Lee ).…”

MEMS High Aspect Ratio Trench Three-Dimensional Measurement Using Through-Focus Scanning Optical Microscopy and Deep Learning Method

“…The dimensional information of the target is extracted by matching the intensity information with the simulation results in the database. For improving the performance, great attention has been paid to minimizing the dissimilarities between the intensity information acquisition and simulation conditions [12][13][14][15][16][17][18][19]. In the meantime, model-based TSOM utilizes only the optical intensity range and the mean-square intensity information of the TSOM image; hence, large amounts of intensity distribution information correlated to the dimensional information of the targets is ignored.…”