Finite element analysis of anchor loss in AlN Lamb wave resonators

Chen, Yung-Yu; Lai, Yen Ting; Lin, Chih‐Ming

doi:10.1109/fcs.2014.6859875

Cited by 18 publications

(8 citation statements)

References 20 publications

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“…Therefore, the two top electrodes of the WS mode resonator are applied by the two voltage sources of 1 V and −1 V. The piezoelectric MEMS resonators do not need a direct current (DC) bias voltage for their operation. The Q anchor of the resonators can be also computed by dividing the resonant frequency by the −3 dB bandwidth of the resonant peak in the displacement or admittance spectrum in the harmonic simulation (Chen et al 2014). In this work, we get the displacement profile of the resonators after the frequency sweep simulation as above discussed.…”

Section: Harmonic Simulationmentioning

confidence: 99%

“…This PML can absorb the elastic waves to prevent the elastic waves reflected back the resonators. The PML can constructed by separately defining match layer (ML) material properties (Bindel et al 2005) or using complex-valued material properties stretched from the virtual domains into the complex planes by functions in COMSOL (Zou et al 2014;Chen et al 2014;COMSOL 2012). In our work, the PML integrated in COMSOL is exploited to model the anchor loss in the resonators.…”

Section: The Q Of the Thin-film Aln-on-diamond Wg And Ws Mode Mems Rementioning

confidence: 99%

See 1 more Smart Citation

Reducing anchor loss In thin-film aluminum nitride-on-diamond contour mode MEMS resonators with support tethers based on phononic crystal strip and reflector

Bao

2015

Microsyst Technol

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Section: Harmonic Simulationmentioning

confidence: 99%

Section: The Q Of the Thin-film Aln-on-diamond Wg And Ws Mode Mems Rementioning

confidence: 99%

Reducing anchor loss In thin-film aluminum nitride-on-diamond contour mode MEMS resonators with support tethers based on phononic crystal strip and reflector

Bao

2015

Microsyst Technol

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“…Due to nature of motion resonator it is not affected by air damping, and the material losses are difficult to predict, so the major loss is anchor loss [33,55,56]. The energy loss mechanism in MEM resonator is also demonstrated by Akhieser effect (AKE) [57]. Moreover Frangi et al [58,59] reported that all thermoelastic losses (Akhieser losses) are included due to sources of dissipation.…”

Section: Device Analysismentioning

confidence: 99%

“…Elastic waves are produced by resonator through tether, this is the major loss of energy. Specific dimension of PML can prevent resonator from reflecting elastic waves, because the elastic waves can be absorbed by PML [57,62,63]. Thus, we have used the perfect match layer through FEA (Finite Element Analysis) simulation to reduce the energy leakage through tethers.…”

Section: Device Analysismentioning

confidence: 99%

Concentric Split Aluminum with Silicon-Aluminum Nitride Annular Rings Resonators

Khan

Bao

et al. 2019

Micromachines

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This paper presents a novel approach of annular concentric split rings microelectromechanical resonators with tether configuration to reduce anchor loss and gives very high-quality factor (Q) 2.97 Million based on FEA (Finite Element Analysis) simulation. The operating frequencies of these resonators are 188.55 MHz to 188.62 MHz. When the proposed SR (square rectangle) hole shaped one dimensional phononic crystal (1D PnC), and two dimensional phononic crystal (2D PnC) structure consist of very wide and complete band gaps is applied to novel design rings MEMS resonators, the quality factor (Q) further improved to 19.7 Million and 1750 Million, respectively, by using the finite element method. It is also observed that band gaps become closer by reducing the value of filling fraction, and proposed SR PnC gives extensive peak attenuation. Moreover, harmonic response of ring resonator is verified by the perfect match layers (PML) technique surrounded by resonators with varying width 1.5λ, and 3λ effectively reduce the vibration displacement.

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“…Among all the conditions, PML has the advantages of being easily implemented into FEM, economically low cost for computer power, and theoretically absorbing waves from any angle of incidence [14,15]. And many researchers have been using PML installed in COMSOL for their own designs [16][17][18][19][20][21][22][23][24].…”

Section: Introductionmentioning

confidence: 99%

Method for optimising the performance of PML in anchor‐loss limited model via COMSOL

Yan

2022

IET Science Measure & Tech

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Perfectly matched layer has been used for solving anchor-loss limited quality factor in the Micro electromechanical systems. However, setting up a well-behaved perfectly matched layer requires users to change the parameters of a perfectly matched layer to give correct results, while the current existing methods for choosing the right parameters are vague and lack theoretical support. Based on the mathematical theory of perfectly matched layer and simulation results of a beam structure's quality factor, this paper proposes a method for choosing the parameter to optimise the performance of perfectly matched layer in COMSOL. The accuracy of the proposed method is proved by matching the effect of substrate height on beam's quality factor with theory prediction. The author also studies the effect of beam height and beam width on the quality factor of the beam. The results demonstrate that simulated quality factors are in agreement with analytical values when the ratio of height over length is small but will show great divergence when height equals the length. This trend can be observed for the beam width as well. Especially for larger ratio of beam width over beam length, instead of decreasing monotonously as analytical equitation would expect, the simulated quality factor will converge into a stable value of 1700, which matches the result of two-dimensional model for the same beam structure. This means that a three-dimensional model has to be used for estimating the quality factor of a beam structure.

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Finite element analysis of anchor loss in AlN Lamb wave resonators

Cited by 18 publications

References 20 publications

Reducing anchor loss In thin-film aluminum nitride-on-diamond contour mode MEMS resonators with support tethers based on phononic crystal strip and reflector

Reducing anchor loss In thin-film aluminum nitride-on-diamond contour mode MEMS resonators with support tethers based on phononic crystal strip and reflector

Concentric Split Aluminum with Silicon-Aluminum Nitride Annular Rings Resonators

Method for optimising the performance of PML in anchor‐loss limited model via COMSOL

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