Five-contact silicon structure based integrated 3D Hall sensor

Roumenin, Chavdar; Nikolov, Dimitar

doi:10.1049/el:20031075

Cited by 10 publications

(4 citation statements)

References 2 publications

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“…In addition, some designs use in‐plane Hall sensors and instrumentation amplifiers to obtain all components of the magnetic field. [ 44 ]…”

Section: Mmg Sensing Technologiesmentioning

confidence: 99%

“…[33,34] Parameter and instrumentation amplifiers to obtain all components of the magnetic field. [44] A second broad categorization of magnetic sensors considers whether the magnetic field causes electrons to move through various layers of semiconductor material within the sensor, the so-called magneto-transport effect. Examples of technologies that benefit from the magneto-transport phenomenon include Hall probes and magneto-resistive, -electric and -impedance sensors.…”

Section: Mmg Sensing Technologiesmentioning

confidence: 99%

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Miniaturized Magnetic Sensors for Implantable Magnetomyography

Zuo

Heidari

Farina

et al. 2020

Adv Materials Technologies

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Magnetism‐based systems are widely utilized for sensing and imaging biological phenomena, for example, the activity of the brain and the heart. Magnetomyography (MMG) is the study of muscle function through the inquiry of the magnetic signal that a muscle generates when contracted. Within the last few decades, extensive effort has been invested to identify, characterize and quantify the magnetomyogram signals. However, it is still far from a miniaturized, sensitive, inexpensive and low‐power MMG sensor. Herein, the state‐of‐the‐art magnetic sensing technologies that have the potential to realize a low‐profile implantable MMG sensor are described. The technical challenges associated with the detection of the MMG signals, including the magnetic field of the Earth and movement artifacts are also discussed. Then, the development of efficient magnetic technologies, which enable sensing pico‐Tesla signals, is advocated to revitalize the MMG technique. To conclude, spintronic‐based magnetoresistive sensing can be an appropriate technology for miniaturized wearable and implantable MMG systems.

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“…In addition, some designs use in‐plane Hall sensors and instrumentation amplifiers to obtain all components of the magnetic field. [ 44 ]…”

Section: Mmg Sensing Technologiesmentioning

confidence: 99%

Section: Mmg Sensing Technologiesmentioning

confidence: 99%

Miniaturized Magnetic Sensors for Implantable Magnetomyography

Zuo

Heidari

Farina

et al. 2020

Adv Materials Technologies

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show abstract

“…Detailed information is displayed in Table 4 . The sensitivities in the horizontal and vertical directions cannot be optimized simultaneously due to the opposite demands on the active region [ 13 ]. Though a balanced performance is achieved [ 14 , 15 , 16 ], there is a compromise in one of sensitivities in the horizontal and vertical directions.…”

Section: Improvement Of the Cross-shaped 3d Hall Devicementioning

confidence: 99%

“…To solve these problems, horizontal and vertical Hall devices were integrated into the same chip [ 7 , 8 , 9 , 10 , 11 , 12 ]. Besides this, in virtue of different biases, a single device can be also used for the measurement [ 13 , 14 , 15 , 16 ]. Current-related sensitivity ( S I ), a main performance parameter of Hall sensors, is related to the doping concentration of the active region and the thickness parallel to the magnetic field.…”

Section: Introductionmentioning

confidence: 99%

A New Design of a Single-Device 3D Hall Sensor: Cross-Shaped 3D Hall Sensor

Tang

Lyu

Wang

et al. 2018

Sensors

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In this paper, a new single-device three-dimensional (3D) Hall sensor called a cross-shaped 3D Hall device is designed based on the five-contact vertical Hall device. Some of the device parameters are based on 0.18 μm BCDliteTM technology provided by GLOBALFOUNDRIES. Two-dimensional (2D) and 3D finite element models implemented in COMSOL are applied to understand the device behavior under a constant magnetic field. Besides this, the influence of the sensing contacts, active region’s depth, and P-type layers are taken into account by analyzing the distribution of the voltage along the top edge and the current density inside the devices. Due to the short-circuiting effect, the sensing contacts lead to degradation in sensitivities. The P-type layers and a deeper active region in turn are responsible for the improvement of sensitivities. To distinguish the P-type layer from the active region which plays the dominant role in reducing the short-circuiting effect, the current-related sensitivity of the top edge (Stop) is defined. It is found that the short-circuiting effect fades as the depth of the active region grows. Despite the P-type layers, the behavior changes a little. When the depth of the active region is 7 μm and the thickness of the P-type layers is 3 μm, the sensitivities in the x, y, and z directions can reach 91.70 V/AT, 92.36 V/AT, and 87.10 V/AT, respectively.

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CMOS 2D Hall microsensor with minimal design complexity

Roumenin

Lozanova

2007

Electron. Lett.

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Five-contact silicon structure based integrated 3D Hall sensor

Cited by 10 publications

References 2 publications

Miniaturized Magnetic Sensors for Implantable Magnetomyography

Miniaturized Magnetic Sensors for Implantable Magnetomyography

A New Design of a Single-Device 3D Hall Sensor: Cross-Shaped 3D Hall Sensor

CMOS 2D Hall microsensor with minimal design complexity

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