Flexible Electronics and Displays: High-Resolution, Roll-to-Roll, Projection Lithography and Photoablation Processing Technologies for High-Throughput Production

Jain, Kanti; Klosner, Marc; Zemel, M.; Raghunandan, Subhashree

doi:10.1109/jproc.2005.851505

Cited by 192 publications

(78 citation statements)

References 8 publications

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“…[28][29][30] Anvik has also preformed research into the large-scale production of microelectronics using R2RNIL. [7,9,18,[21][22][23][24][25][26][27][28][29][30] Of the continuous types of micropatterning processes, UV R2RNIL and thermal R2R embossing appear to yield the most promising results, and both of these processes have their own distinct advantages. In UV R2RNIL, a polymer film is coated with a photosensitive resist and placed in contact with a mold roll while simultaneously exposing the contact region to high intensity ultraviolet light, initiating a fast polymerization reaction.…”

Section: Introductionmentioning

confidence: 99%

A novel process for continuous thermal embossing of large‐area nanopatterns onto polymer films

2009

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Hot embossing and nanoimprinting processes are being widely practiced in industry. Fast and reliable production of micro/nanofeatured patterns on large‐area polymer films is of a great importance. In this study, a novel roll‐to‐roll thermal imprinting process was developed, capable of providing a mold‐heating rate of 125°C/s with sufficient temperature control to produce large‐area patterns continuously at a rapid production rate. With this new process, selected micro/nano patterns were produced on a polyethylene terephthalate film at a production rate exceeding 1 m/min. The roller mold temperature played a profound role in affecting the replication quality. To achieve good feature transfer properties, an elevated roller mold temperature approaching the melting temperature of the polymer was found to be critical. Microcavity filling time calculation further revealed that the elevated roller mold temperature is also necessary for achieving a rapid film feed rate as desired in the continuous roll‐to‐roll process. © 2010 Wiley Periodicals, Inc. Adv Polym Techn 28:246–256, 2009; Published online in Wiley InterScience (http://www.interscience.wiley.com). DOI 10.1002/adv.20167

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Section: Introductionmentioning

confidence: 99%

A novel process for continuous thermal embossing of large‐area nanopatterns onto polymer films

2009

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“…Progress in other, more recent, forms of electronics is driven instead by the ability to achieve integration on unconventional substrates (e.g., low-cost plastics, foils, paper) or to cover large areas. [1,2] For example, new forms of X-ray medical diagnosis might be achieved with large-area imagers that can conformally wrap around the body and digitally image the desired tissue.[3] Lightweight, wall-size displays or sensors that can be deployed onto a variety of surfaces and surface shapes might provide new technologies for architectural design. Various materials including small organic molecules, [4][5][6][7][8] polymers, [9] amorphous silicon, [10][11][12] polycrystalline silicon, [13][14][15][16] single crystalline silicon nanowires, [17,18] and microstructured ribbons [19][20][21][22] have been explored to serve as semiconductor channels for the type of thin-film electronics that might support these and other applications.…”

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confidence: 99%

Buckled and Wavy Ribbons of GaAs for High‐Performance Electronics on Elastomeric Substrates

et al. 2006

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Performance capabilities in traditional microelectronics are measured mainly in terms of speed, power efficiency, and level of integration. Progress in other, more recent, forms of electronics is driven instead by the ability to achieve integration on unconventional substrates (e.g., low-cost plastics, foils, paper) or to cover large areas. [1,2] For example, new forms of X-ray medical diagnosis might be achieved with large-area imagers that can conformally wrap around the body and digitally image the desired tissue.[3] Lightweight, wall-size displays or sensors that can be deployed onto a variety of surfaces and surface shapes might provide new technologies for architectural design. Various materials including small organic molecules, [4][5][6][7][8] polymers, [9] amorphous silicon, [10][11][12] polycrystalline silicon, [13][14][15][16] single crystalline silicon nanowires, [17,18] and microstructured ribbons [19][20][21][22] have been explored to serve as semiconductor channels for the type of thin-film electronics that might support these and other applications. These materials enable transistors with mobilities that span a wide range (from 10 -5 to 500 cm 2 V -1 s -1 ), and in mechanically bendable thin-film formats on flexible substrates. Applications with demanding high-speed operations, such as large-aperture interferometric synthetic aperture radar (InSAR) and radio frequency (RF) surveillance systems, require semiconductors with much higher mobilities, such as GaAs or InP. The fragility of single crystalline compound semiconductors creates a number of fabrication challenges that must be overcome in order to fabricate high-speed, flexible transistors with them. We recently established a practical approach to build metal semiconductor field-effect transistors (MESFETs) on plastic substrates by using printed GaAs wire arrays created from high-quality bulk wafers. [23,24] These devices exhibit excellent mechanical flexibility and unity current gain frequencies (f T ) that approach 2 GHz, even in moderately scaled devices (e.g., micrometer gate lengths). The work described in this article demonstrates GaAs ribbon based MESFETs (as opposed to our previously reported wire devices) designed with special geometries that provide not only bendability, but mechanical stretchability to levels of strain (strain ranges of > 20 %) that significantly exceed the intrinsic yield points of GaAs itself (ca. 2 %). The resulting type of stretchable, high-performance electronic systems can provide extremely high levels of bendability and the capacity to integrate conformally with curvilinear surfaces. The work that we report on this GaAs system extends our recently described "wavy" silicon [25] in four important ways: i) it demonstrates stretchability in GaAs, a material that is in practical terms much more mechanically fragile than Si; ii) it introduces a new "buckled" geometry that can be used for stretchability together with or independently of the previously described "wavy" configuration; iii) it achieves a new class of s...

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“…Although the board itself was rigid in this initial prototype, it was small and externally placed to not influence the sensor performance. Moreover, one can easily port the electronics onto a flexible printed circuit board on a polyimide substrate through commercial vendors or explore emerging paper/textile substrates [54][55][56] .…”

Section: Physical Sensorsmentioning

confidence: 99%

A toolkit of thread-based microfluidics, sensors, and electronics for 3D tissue embedding for medical diagnostics

et al. 2016

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Threads, traditionally used in the apparel industry, have recently emerged as a promising material for the creation of tissue constructs and biomedical implants for organ replacement and repair. The wicking property and flexibility of threads also make them promising candidates for the creation of three-dimensional (3D) microfluidic circuits. In this paper, we report on thread-based microfluidic networks that interface intimately with biological tissues in three dimensions. We have also developed a suite of physical and chemical sensors integrated with microfluidic networks to monitor physiochemical tissue properties, all made from thread, for direct integration with tissues toward the realization of a thread-based diagnostic device (TDD) platform. The physical and chemical sensors are fabricated from nanomaterial-infused conductive threads and are connected to electronic circuitry using thread-based flexible interconnects for readout, signal conditioning, and wireless transmission. To demonstrate the suite of integrated sensors, we utilized TDD platforms to measure strain, as well as gastric and subcutaneous pH in vitro and in vivo.

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Flexible Electronics and Displays: High-Resolution, Roll-to-Roll, Projection Lithography and Photoablation Processing Technologies for High-Throughput Production

Cited by 192 publications

References 8 publications

A novel process for continuous thermal embossing of large‐area nanopatterns onto polymer films

A novel process for continuous thermal embossing of large‐area nanopatterns onto polymer films

Buckled and Wavy Ribbons of GaAs for High‐Performance Electronics on Elastomeric Substrates

A toolkit of thread-based microfluidics, sensors, and electronics for 3D tissue embedding for medical diagnostics

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