Flexible magnetic sensor based on FBAR

Wu, Yong; Dong, Shurong; Jin, Hao; Wang, Xiaozhi; Chen, Guohao

doi:10.1109/inec.2016.7589341

Cited by 6 publications

(3 citation statements)

References 5 publications

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“…Acoustic wave devices have been used in medical, industrial and commercial sensor applications for more than 60 years [2]. Acoustic wave devices, such as surface acoustic waves (SAW) and bulk acoustic waves (BAW), are widely used in gas, temperature, mass, pressure, humidity, bio, magnetic and UV sensors [3][4][5][6][7][8][9][10][11][12][13][14][15]. BAW resonators, such as thin-film bulk acoustic wave resonators (FBAR), offer high sensitivity, high frequency, ppb level detection, label-free sensing capability, CMOS compatibility and small size compared to surface acoustic wave resonators [16][17][18].…”

Section: Introductionmentioning

confidence: 99%

3D FEM Simulation and Analysis of Fractal Electrode-Based FBAR Resonator for Tetrachloroethene (PCE) Gas Detection

Panchal

Varghese

2022

Fractal Fract

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This paper presents the FEM modeling and simulation of a thin-film bulk acoustic resonator (FBAR) for a tetrachloroethene (PCE) gas-sensing application. A zinc oxide layer is used as a piezoelectric material; an aluminum layer is used as the electrode material in the structure of the FBAR. Polyisobutylene (PIB) is used as the sensitive layer for PCE gas detection. The study was carried out in commercially available FEM-based COMSOL software. The proposed structure was exposed to six different organic gases with concentrations ranging from 0 to 1000 ppm. The structure showed high selectivity for PCE gas. Incorporating the 3rd-order Hilbert fractal geometry in the top electrode of the FBAR increased the sensitivity of the sensor which showed high selectivity for PCE gas detection. A sensitivity enhancement of 66% was obtained using fractal geometry on the top electrode of the FBAR without alteration in size or cost. In addition, a reduction in the cross-sensitivity was achieved. Further, the PIB layer thickness and active area of the FBAR were optimized to obtain high sensitivity. The equivalent circuit was also analyzed to understand the behavior of the sensing effect and mechanism.

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Section: Introductionmentioning

confidence: 99%

3D FEM Simulation and Analysis of Fractal Electrode-Based FBAR Resonator for Tetrachloroethene (PCE) Gas Detection

Panchal

Varghese

2022

Fractal Fract

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show abstract

“…Simultaneously, some works through modeling and simulation methods are also demonstrated. Wu et al reported a flexible magnetic sensor based on a BAW resonator, the equivalent Mason model of the sensor circuit was established, and its sensitivity was improved by selecting the electrode of giant magnetostrictive material with a large frequency offset [19]. Martos et al proposed a circuit simulation model of a novel miniaturized magnetoelectric antenna which is applied in low-power sensing [20].…”

Section: Introductionmentioning

confidence: 99%

Design and Optimization of a BAW Magnetic Sensor Based on Magnetoelectric Coupling

Ren

Guo³

et al. 2022

Micromachines

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Magnetic sensors actuated by bulk acoustic wave (BAW) have attracted extensive attention due to the fact of their high sensitivity, GHz-level high frequency, and small size. Different from previous studies, suppression of energy loss and improvement in energy conversion efficiency of the BAW magnetoelectric (ME) sensor were systematically considered during the device design in this work. Finite element analysis models of material (magnetic composite), structure (ME heterostructure), and device (BAW ME magnetic sensor) were established and analyzed in COMSOL software. Additionally, the magnetic composite was prepared by radio frequency magnetron sputtering, and its soft magnetism was characterized by magnetic hysteresis loop and surface roughness. The research results demonstrate that after inserting four layers of 5 nm Al2O3 films, a performance of 86.7% eddy current loss suppression rate, a less than 1.1% magnetostriction degradation rate, and better soft magnetism were achieved in 600 nm FeGaB. Furthermore, compared with other structures, the two-layer piezomagnetic/piezoelectric heterostructure had a better ME coupling performance. Eventually, the design of the BAW ME magnetic sensor was optimized by the resonance-enhanced ME coupling to match the resonance frequency between the magnetic composite and the BAW resonator. When a 54,500 A/m direct current bias magnetic field was applied, the sensor worked at the first-order resonance frequency and showed good performance. Its linearity was better than 1.30%, the sensitivity was as high as 2.33 μmV/A, and the measurement range covered 0–5000 A/m.

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“…FBAR devices are key components of modern telecommunication systems, including mobile phones. They are also widely investigated for sensor applications as they can be very sensitive to environmental parameters, including temperature [7][8][9], pressure [10,11], magnetic [12], etc. The acoustic wave resonators sensors have great added value especially for high temperature application, as they are passive components, thus requiring neither embedded electronics, nor a power source to be interrogated wirelessly [13][14][15].…”

Section: Introductionmentioning

confidence: 99%

The research of dual-mode film bulk acoustic resonator for enhancing temperature sensitivity

Zhao¹,

Xing²,

Han³

et al. 2021

Semicond. Sci. Technol.

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A dual-mode film bulk acoustic resonator (DM-FBAR) temperature sensor modulated by different phosphorous-doped silica insertion layers was reported in this paper. The relative drift of the second and third resonance peaks of FBAR could improve the temperature sensitivity through the dual-mode beat frequency calculation method. The temperature sensitivity can be regulated by different the PH 3 doping flow in the SiO 2 insertion layer. Among the fabricated devices, FBAR with a SiO 2 insertion layer doped 4 sccm PH 3 has the highest temperature sensitivity of 64.8 kHz • C −1 . It is discovered that the greater the Young's modulus of the insert film changes with temperature, the higher the temperature sensitivity of DM-FBAR device. Therefore, an important technical means to improve the performance of DM-FBAR devices is using the material whose Young's modulus is more sensitive to temperature in the future.

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Flexible magnetic sensor based on FBAR

Cited by 6 publications

References 5 publications

3D FEM Simulation and Analysis of Fractal Electrode-Based FBAR Resonator for Tetrachloroethene (PCE) Gas Detection

3D FEM Simulation and Analysis of Fractal Electrode-Based FBAR Resonator for Tetrachloroethene (PCE) Gas Detection

Design and Optimization of a BAW Magnetic Sensor Based on Magnetoelectric Coupling

The research of dual-mode film bulk acoustic resonator for enhancing temperature sensitivity

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