Flexible Metal Halide Perovskite Photodetector Arrays via Photolithography and Dry Lift‐Off Patterning

Abstract

Metal halide perovskites draw increasing attention as photodetector materials due to their strong visible light absorption and resulting photocurrent. The development of efficient fabrication routes to realize high‐resolution perovskite pixel arrays is critical to enable practical devices. Herein, a dry lift‐off process to fabricate methylammonium lead iodide (MAPbI3) pixels on different substrates is reported, with a resolution down to 5 μm. Accordingly, 8 × 10 photodetector arrays are fabricated on both glass and flexible polyethylene terephthalate (PET). These arrays show a sensitive photoresponse over a broad wavelength range from 320 to 760 nm. Moreover, when encapsulated by a Parylene‐C overlayer, the photodetector arrays on glass substrate show remarkable air stability, without noticeable performance loss after 10 days in ambient air, and the flexible photodetector arrays on PET substrate show excellent bending tolerance, retaining nearly 95% of the response after 170 bending cycles.

Growth and High-Performance Photodetectors of CsPbBr3Single Crystals

“…Single crystal photodetectors have a much different order of electrode fabrication than the common perovskite thin film detectors. Thin film detectors are usually fabricated from perovskite onto the surface of prepared electrodes with structures to achieve the detection signal, such as vertical and lateral electrodes. − In contrast, single crystal detectors are prepared on the surface of grown single crystals, which are usually centimeter-thick and use flat electrodes in order to achieve good signal derivation, which have a smaller contact area with the active layer than vertical and lateral electrodes.…”

Engineering the Comfort‐of‐Wear for Next Generation Wearables

“…[131,132] As they can be processed at low temperatures, it is possible to fabricate them on plastics and ultrathin substrates, which, as discussed earlier, can dramatically improve the bending stiffness. [133][134][135] Furthermore, this allows them to be laminated onto other substrates such as textiles. [136,137] Recently, along with the demonstration of stretchable organic semiconductors and conductors, intrinsically stretchable photovoltaics have been developed.…”

Mass Transfer Printing of Metal‐Halide Perovskite Films and Nanostructures

“…Several alternative methods have been tried to make perovskite nanostructures in the past few years including photolithography, [ 27,28 ] inkjet printing, [ 29–31 ] thermal evaporation, [ 32,33 ] transfer printing, [ 34–36 ] etc. As far as we know, those methods still have issues at the current stage, which limits their real applications.…”

“…[7][8][9][10][11][12][13][14][15][16][17][18][19] Nevertheless, the spin coating method only works well on flat rigid substrates, which cannot meet the diverse requirements for real applications such as depositing films on various flexible or curved surfaces, [20] and making patterned films with different compositions for white emission and full-color displays. [21][22][23][24][25][26] Several alternative methods have been tried to make perovskite nanostructures in the past few years including photolithography, [27,28] inkjet printing, [29][30][31] thermal evaporation, [32,33] transfer printing, [34][35][36] etc. As far as we know, those methods still have issues at the current stage, which limits their real applications.…”