2014
DOI: 10.1063/1.4872256
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Flexible radio-frequency single-crystal germanium switch on plastic substrates

Abstract: This Letter presents the realization and characterizations of the flexible radio-frequency (RF)/microwave switches on plastic substrates employing single-crystal germanium (Ge) nanomembranes. The fabricated flexible Ge single-pole, single-throw (SPST) switches display high frequency responses (e.g., insertion loss of <1.3 dB at up to 30 GHz and isolation >10 dB at up to ∼13 GHz). RF performance tradeoff exists for the flexible Ge switches and the major affecting parameters are determined. The fle… Show more

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Cited by 16 publications
(5 citation statements)
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“…Using extrapolation of U and |h 21 | 2 with a -20 dB/dec roll-off yields method, which shows the cut off frequency f T = 395 GHz, the maximum oscillation frequency f MAX = 630 GHz The RF performance f T and f MAX of the flexible substrate InP DHBT device in this paper are compared with the performance of other flexible transistors reported previously in Refs. [13,15,17,18,[24][25][26][27], as shown in Table 1. Our work shows the highest RF frequency performance of flexible devices to date, besides confirms the potential of flexible substrate InP DHBT for high frequency applications.…”
Section: Resultsmentioning
confidence: 99%
“…Using extrapolation of U and |h 21 | 2 with a -20 dB/dec roll-off yields method, which shows the cut off frequency f T = 395 GHz, the maximum oscillation frequency f MAX = 630 GHz The RF performance f T and f MAX of the flexible substrate InP DHBT device in this paper are compared with the performance of other flexible transistors reported previously in Refs. [13,15,17,18,[24][25][26][27], as shown in Table 1. Our work shows the highest RF frequency performance of flexible devices to date, besides confirms the potential of flexible substrate InP DHBT for high frequency applications.…”
Section: Resultsmentioning
confidence: 99%
“…Flexible RF switches based on transfer-printed Si and Ge NMs with simple circuits structure as shown in Figure 9a have been demonstrated on plastic substrates. [155,249,250] The flexible RF switches share the same fabrication methodology as the flexible microwave transistors made on NMs, [69] where ion implantation and thermal annealing procedures were carried on rigid SOI or Ge-on-insulator substrates to circumvent incompatibility with plastic substrates. The sub-micrometer thick of NM enabled lateral PIN diodes and single-pole single-throw (SPST) switches realized by forming electrodes and interconnect metal using conventional planar fabrication techniques.…”
Section: Circuit-last Approachmentioning
confidence: 99%
“…The versatility of this technique was further demonstrated by applying it to single-crystal germanium (Ge) nanomembranes to form flexible devices displaying GHz response (insertion loss of <1.3 dB at up to 30 GHz and isolation >10 dB at up to ∼13 GHz) [59,60], and later by demonstrating microwave flexible SiNM-based TFTs [61] and Schottky diodes [62] on biodegradable substrates, such as cellulose nanofibrillated fibre (CNF), towards potential green portable devices. Double-gate flexible SiNM TFTs built on a CNF substrate have shown an electron mobility of 160 cm 2 V −1 s −1 and f T and f max of 4.9 GHz and 10.6 GHz, respectively [61].…”
Section: Single Crystalline Si Nanomembranesmentioning
confidence: 99%