2016
DOI: 10.1021/acsphotonics.6b00042
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Flexible Thin-Film InGaAs Photodiode Focal Plane Array

Abstract: 10×10 photodiode array fabricated on Si and Kapton ® substrateThe 10×10 thin-film In 0.53 Ga 0.47 As p-i-n photodiode arrays are fabricated on both a 500 µm thick semi-insulating Si substrate and a 25 µm thick E-type Kapton ® foil. The fabrication processes of 10×10 arrays are similar to that of the 8×100 photodiode array, although the photodiode dimensions are different. For the 10×10 arrays, the top ring contacts have 20 µm/30 µm inner/outer diameters that define the light detection area. Photodiode mesa dia… Show more

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Cited by 41 publications
(36 citation statements)
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“…To meet the demands of the aforementioned applications, a successful flexible photodetector design necessarily mandates both mechanical ruggedness and superior optical performance such as high signal-to-noise ratio (SNR) and fast response. To date, flexible photodetector devices have been implemented based on several material platforms, including organic polymers [20][21][22][23], nanowires or nanotubes [24][25][26][27][28][29][30], 2D materials [31][32][33][34], perovskites [35][36][37][38], and semiconductor nanomembranes (NMs) [39][40][41][42][43]. Supplement 1 (Table S1) highlights state-of-the-art flexible photodetector devices fabricated from these material systems.…”
Section: Introductionmentioning
confidence: 99%
“…To meet the demands of the aforementioned applications, a successful flexible photodetector design necessarily mandates both mechanical ruggedness and superior optical performance such as high signal-to-noise ratio (SNR) and fast response. To date, flexible photodetector devices have been implemented based on several material platforms, including organic polymers [20][21][22][23], nanowires or nanotubes [24][25][26][27][28][29][30], 2D materials [31][32][33][34], perovskites [35][36][37][38], and semiconductor nanomembranes (NMs) [39][40][41][42][43]. Supplement 1 (Table S1) highlights state-of-the-art flexible photodetector devices fabricated from these material systems.…”
Section: Introductionmentioning
confidence: 99%
“…Other strategies use intrinsically soft materials (for example, organic, 0D/1D/2D nanomaterials, and perovskites) or additional optical subsystems to capture images on a curved focal plane . Inherently soft materials provide high bendability and thus facilitate the fabrication of highly curved photodetector arrays (Figure c) .…”
Section: Biomimicry Of Single‐chambered Eyesmentioning
confidence: 99%
“…Currently, commercial photodetectors (PDs) are mainly made from the inorganic semiconductor materials, including Si, ZnO, GaN, and InGaAs . These devices show fast response and high responsivity due to their outstanding electrical and optical properties.…”
Section: Introductionmentioning
confidence: 99%