Flow Velocity Gradient Sensing Using a Single Curved Bistable Microbeam

Kessler, Yoav; Liberzon, Alex; Krylov, Slava

doi:10.1109/jmems.2020.3012690

Cited by 17 publications

(3 citation statements)

References 17 publications

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“…These properties are harnessed for precision measurements across various domains of study. Certain studies have showcased the successful practical application of such mechanical architectures for high-precision measurements, encompassing parameters like force/transnational acceleration [5], displacements [6], velocity [7], and gas sensors [8,9].…”

Section: Introductionmentioning

confidence: 99%

Modeling and Structural Analysis of MEMS Shallow Arch Assuming Multimodal Initial Curvature Profiles

Alneamy,

Ouakad

2024

Mathematics

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The present investigation focuses on the design and mathematical modeling of a microelectromechanical (MEMS) mode-localized based sensor/actuator system. This device incorporates a sensitive clamped–clamped shallow arch microbeam with an initial curvature shaped to resemble one of the first two symmetric and asymmetric modes of free oscillations of a clamped–clamped beam. The analysis reveals that with a suitable arrangement of the initial shape of the device flexible electrode and a proper tuning of the maximum initial rise and the actuating dc load enables the transition to display certain bistable behavior. This could be a better choice to build a device with a large stroke. Furthermore, the generated data showed the occurrence of mode-veering, indicating a coupling between the concerned symmetric and asymmetric modes of vibrations, and offering the possibility for such a device to be used as a mode-localized MEMS-based sensor utilizing veering and crossing phenomena. Indeed, where a certain energy is exchanged between symmetric and asymmetric modes of a microbeam, it can be utilized to serve as a foundation for the development of a new class of highly precise resonant sensors that can capture, with a certain level of precision, any of the sensed signal amplitudes.

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Section: Introductionmentioning

confidence: 99%

Modeling and Structural Analysis of MEMS Shallow Arch Assuming Multimodal Initial Curvature Profiles

Alneamy,

Ouakad

2024

Mathematics

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“…Over the past decades, micro-electromechanical systems (MEMS)-based sensors have proven high reliability, low power consumption, and ease of integration, possibly becoming the most suitable candidate for ultrasensitive sensors [1]. The small size and high sensitivity of MEMS sensors allow their integration in a wide range of potential applications, including gyroscopes [2][3][4], accelerometers [5][6][7], mass sensors [8][9][10], and gas sensors [11][12][13].…”

Section: Introductionmentioning

confidence: 99%

A multi-sensing scheme based on nonlinear coupled micromachined resonators

et al. 2023

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A new multi-sensing scheme via nonlinear weakly coupled resonators is introduced in this paper, which can simultaneously detect two different physical stimuli by monitoring the dynamic response around the first two lowest modes. The system consists of a mechanically coupled bridge resonator and cantilever resonator. The eigenvalue problem is solved to identify the right geometry for the resonators to optimize their resonance frequencies based on mode localization in order to provide outstanding sensitivity. A nonlinear equivalent model is developed using the Euler–Bernoulli beam theory while accounting for the geometric and electrostatic nonlinearities. The sensor's dynamics are explored using a reduced-order model based on two-mode Galerkin discretization, which reveals the richness of the response. To demonstrate the proposed sensing scheme, the dynamic response of the weakly coupled resonator is investigated by tuning the stiffness and mass of the bridge and cantilever resonators, respectively. With its simple and scalable design, the proposed system shows great potential for intelligent multi-sensing detection in many applications.

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“…At present, the most accurate method for solving the device-level dynamic characteristics of MEMS is to establish an effective partial differential equation (PDES) to describe the nonlinear dynamic characteristics of the system in mathematical form through the analysis of its working principle and coupled physical model and then solve it by finite element method (FEM), boundary element method (BEM), finite difference method (FDM), and other methods after selecting effective control parameters. To improve the accuracy of the calculation, the model needs to be divided into a very detailed grid to solve, the refinement of the grid will inevitably lead to the allocation of a large number of resources, which cannot meet the solution under multiparameters and multiexcitation, so the optimization efficiency of the parameter design space is very low, and it is even more difficult to deal with the MEMS devices of multidevices [11][12][13][14][15][16]. In this paper, according to the principle of conservation of energy, the MECB model of the building monitoring MEMS is constructed.…”

Section: Introductionmentioning

confidence: 99%

MEMS Dynamic Characteristics Analysis of Electrostatic Microbeams for Building Structure Monitoring

Gong

Hong

Zhou

et al. 2022

Advances in Civil Engineering

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Building structure health monitoring is essential for modern buildings, sensors related to building structure health monitoring are often made with microelectrostatic cantilever beam (MECB), and the performance of this kind of devices is often affected by instability, which affects the measurement results and accuracy. Therefore, it is necessary to study the nonlinear dynamic characteristics of the MECB in the process of bending and pull-in. In this paper, based on the energy principle and fluid pressure film damping effect, the dynamic equation mathematical model of MECB is established and then the dynamic characteristics of the pull-in and lift-off voltage of the MECB and the harmonic motion characteristics under the bias voltage are obtained, which provides guidance for the design of the electrostatic driving sensor.

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Flow Velocity Gradient Sensing Using a Single Curved Bistable Microbeam

Cited by 17 publications

References 17 publications

Modeling and Structural Analysis of MEMS Shallow Arch Assuming Multimodal Initial Curvature Profiles

Modeling and Structural Analysis of MEMS Shallow Arch Assuming Multimodal Initial Curvature Profiles

A multi-sensing scheme based on nonlinear coupled micromachined resonators

MEMS Dynamic Characteristics Analysis of Electrostatic Microbeams for Building Structure Monitoring

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