2001
DOI: 10.1016/s0032-3861(00)00503-6
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Focused ion beam/lift-out transmission electron microscopy cross sections of block copolymer films ordered on silicon substrates

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Cited by 53 publications
(33 citation statements)
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“…Focused-ion-beam (FIB) instruments are useful for local nanoscale machining and structural characterization. [26] We used the FIB to make cross sections of the PEDOT nano-fibers deposited on the microfabricated electrodes. As shown in Figures 2C,D the PEDOT nanofibers are hollow as expected from the impedance results.…”
mentioning
confidence: 99%
“…Focused-ion-beam (FIB) instruments are useful for local nanoscale machining and structural characterization. [26] We used the FIB to make cross sections of the PEDOT nano-fibers deposited on the microfabricated electrodes. As shown in Figures 2C,D the PEDOT nanofibers are hollow as expected from the impedance results.…”
mentioning
confidence: 99%
“…The shadow-FIB method does not require a protective Pt layer sputtered on the top surface of the sample, as is necessary in the lift-out FIB method. [23,27] This helps to avoid any potential damage to the polymer/air interface caused by metal deposition. [28] Figure 2a shows the shadow FIB-TEM image of the as-cast P9 (25) film that was only contacted with dry air.…”
mentioning
confidence: 99%
“…Limited amount of preferential milling occurs because the ion beam is near perpendicular to the sample. This has enabled lamellae to be prepared of polymers on glass (Loos et al, 2003) and silicon (White et al, 2001), imprinted poly(methyl methacrylate) on silicon (Langford et al, 2002a,b,c), and patterned photoresist on silicon (De Veirman and Weaver, 1999). Figure 1a shows a FIB cross-section through a nanoindent in a 2-lm-thick polyvinyl acetate film on silicon.…”
Section: Advantages Of Using Fibsmentioning
confidence: 99%