2020
DOI: 10.1016/j.tsf.2020.138424
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Formation and stability of W coating on a flexible polyimide substrate

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Cited by 8 publications
(3 citation statements)
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“…Among electrode materials, due to their excellent mechanical properties, metals and oxides are promising flexible memristor electrode materials. Some of these metal materials have high conductivity and flexibility, such as Ti [22], Mg [23], Ag [24], and W [25]. These materials are used in the preparation of flexible memristors.…”
Section: Flexible Electrode Materialsmentioning
confidence: 99%
“…Among electrode materials, due to their excellent mechanical properties, metals and oxides are promising flexible memristor electrode materials. Some of these metal materials have high conductivity and flexibility, such as Ti [22], Mg [23], Ag [24], and W [25]. These materials are used in the preparation of flexible memristors.…”
Section: Flexible Electrode Materialsmentioning
confidence: 99%
“…The main methods of thin-film deposition are vacuum evaporation (sputtering) with indirect heating; ion-plasma sputtering; deposition from the gas phase using gas-transport reactions; reduction in a hydrogen atmosphere, and thermochemical decomposition, etc. [17][18][19]. The choice of one or another method depends on the nature of the deposited material, substrate material, structure (amorphous, polycrystalline, or monocrystalline), and the thickness of the metal film [20][21][22][23].…”
Section: Introductionmentioning
confidence: 99%
“…Magnetron targets serve as a source of coating the material by magnetron sputtering. Besides, this method ensures reproducibility of coating properties, uniformity of their thickness and adhesion to different substrates [1,2]. But the reproducibility of volumetric composite targets remains a decisive factor in the method of their manufacture.…”
Section: Introductionmentioning
confidence: 99%