2018
DOI: 10.1002/ppap.201700185
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Formation of lateral chemical gradients in plasma polymer films shielded by an inclined mask

Abstract: Low pressure plasma deposition conditions are investigated yielding oxygencontaining lateral gradient coatings (a─C:H:O) by means of an inclined static mask partly shielding the substrate. Such lateral gradient coatings are formed by the diffusion of film-forming species with different reactivities underneath the mask.Surface characterization revealed varying film growth conditions below the mask different from direct plasma exposure with increasing distance from the mask/plasma edge: i) exponentially decreasi… Show more

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Cited by 6 publications
(5 citation statements)
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“…The PP type selection was based on previous detailed studies of PECVD from cyclopropylamine (CPA) vapors mixed with Ar (for amine PPs), [13,22,23] and PECVD from the mixture of ethylene (C 2 H 4 ) and carbon dioxide (CO 2 ) for carboxyl PPs. [24][25][26] Three types of amine PPs were deposited at a pressure of 50 Pa and an Ar flow rate of 28 sccm; the flow rate of CPA was held at 2 sccm. In two cases, the radio frequency (RF) discharge was operated in the pulsed mode using the duty cycle (DC) of 33% and the repetition frequency of 500 Hz.…”
Section: Preparation and Characterization Of Ppsmentioning
confidence: 99%
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“…The PP type selection was based on previous detailed studies of PECVD from cyclopropylamine (CPA) vapors mixed with Ar (for amine PPs), [13,22,23] and PECVD from the mixture of ethylene (C 2 H 4 ) and carbon dioxide (CO 2 ) for carboxyl PPs. [24][25][26] Three types of amine PPs were deposited at a pressure of 50 Pa and an Ar flow rate of 28 sccm; the flow rate of CPA was held at 2 sccm. In two cases, the radio frequency (RF) discharge was operated in the pulsed mode using the duty cycle (DC) of 33% and the repetition frequency of 500 Hz.…”
Section: Preparation and Characterization Of Ppsmentioning
confidence: 99%
“…The carboxyl PPs were deposited according to the procedure previously optimized on Si substrates for improved stability and surface functionality. [24,25] The C 2 H 4 gas flow rate was held constant at 4 sccm. First, a highly crosslinked base layer was prepared at the RF power and the CO 2 /C 2 H 4 flow rate ratio of 70 W and 2:1, respectively.…”
Section: Preparation and Characterization Of Ppsmentioning
confidence: 99%
“…1(a)]. 33 Amino-based (named "CN-"), respectively, CO-bilayers were deposited in a one-step process by a fast change of the plasma conditions at a predefined point in time during the deposition to obtain a highly cross-linked polymer base layer, covered by a less cross-linked but more functional top layer. 19,21 On the one hand, the power was decreased to reduce the ionic bombardment and thus the cross-linking of the top layer polymer.…”
Section: A Plasma Polymer Films Design and Fabricationmentioning
confidence: 99%
“…11 In addition, a slight increase in C/H is observed in the direction toward the closed-end. This can be attributed to the decreasing film thickness in this region: 33 Below a thickness of %5 nm, ToF-SIMS detects the polymer fragments which are directly attached to the substrate. This is supported by the detection of increasing SiCintensity in this region (not shown here).…”
Section: A Film Deposition Mechanisms and Local Propertiesmentioning
confidence: 99%
“…Due to the concentration gradient of the polymers, many important properties of the films such as wettability, mechanical/optical/thermal properties, density of functional groups and cell adhesion as a function of the elastic modulus can be finely tuned. The gradient films can be prepared by many methods, which include dissolution and diffusion methods [11], temperature gradient field method [12], as interpenetrating polymer networks [13], by extrusion [14,15], microfluidic techniques [16,17], electrochemical technique [18], centrifugation [19], and so on [20,21,22]. Till date, FGMs have been potentially used in various fields such as medicine [23,24,25,26,27,28], biology [29,30,31,32], and optics [5,33,34,35].…”
Section: Introductionmentioning
confidence: 99%