Formation of wide and narrow optical-band-gap amorphous-CNx:H films using i-C4H10/N2 supermagnetron plasma

Field-emission characteristics of diamond-like amorphous carbon films deposited by mixed gas (N2 or H2) controlled i-C4H10 supermagnetron plasma

“…The absorption band at 2930 cm − 1 (CH 3 , CH 2 , and CH bonds) [22] was weak and less sensitive independently of the nitrogen concentrations. In the case of low rf powers of 10 W/5 W, however, strong absorption band at 2930 cm − 1 was observed in the deposited film, i.e., polymer-like film [23]. The 10 W/5 W film included many CH bonds and showed broad white photoluminescence (PL), as reported in Ref.…”

“…The 10 W/5 W film included many CH bonds and showed broad white photoluminescence (PL), as reported in Ref. [23]. The full width at half-maximum (FWHM) of the PL band with excitation energy of 3.81 eV and the PL peak energy reported in Ref.…”

“…The full width at half-maximum (FWHM) of the PL band with excitation energy of 3.81 eV and the PL peak energy reported in Ref. [23] were about 273 nm and 565 nm, respectively. Rusli et al reported that the broadband PL is caused by electron-hole pair recombination in the broad tail state due to sp 2 clustered hydrogenated carbon [24].…”

Sputter-assisted plasma CVD of wide or narrow optical bandgap amorphous CNx:H films using i-C4H10/N2 supermagnetron plasma

“…The refractive index at region I was about 2.1 (λ = 632.8 nm), and that at region II was about 1.7. The refractive index of 2.1 is a typical value of diamond-like amorphous carbon films, and that of 1.7 is a typical one of polymer-like films [5].…”

“…Hard or soft amorphous CN x :H films are highly promising base material for field emission [1][2][3] or photoluminescence [4,5], respectively. Nitrogen incorporation into amorphous C:H films is of particular interest due to the reductions of both the film stress and the density of coordination defects that exist in a-C:H films due to unsaturated dangling bonds [6,7].…”