“…Miniaturized microfluidics sensors, for example, can use silicon oxide or silicon nitride as waveguide and immobilization platform. In particular, Si x N 4 is widely used, for example, as waveguide material in refractometric [Karymov, et al, 1995] or fluorescence [Anderson, et al, 2008] detection. Among all optical techniques, one type of surface-based detection technique, surface plasmon resonance (SPR), has had magnificent success in the last 20 years [Phillips, K.S.…”