Fundamental properties in the formation of Co, Ni, and Pt metal thin films using pulsed laser deposition

Abstract

Interface structure and surface morphology of (Co, Fe, Ni)/Cu/Si(100) thin films Co, Ni, and Pt metal thin films have been formed using the pulsed laser deposition method. Several fundamental properties of this method, e.g., deposition rate for the KrF excimer laser with various irradiation energy densities, distribution of film thickness, change of the deposition rate as a function of the number of shots, change of the target morphology, and corresponding film structure, are examined. It is found that the deposition rate and the film structure ͑amorphous and/or polycrystalline͒ depend on the state of the morphology of the target. An attempt to control the target morphology was performed, i.e., the rotation of the Co target restrained the target surface from the formation of laser cones and as a result, the amorphous Co films could be obtained.

Magnetic domain structures and nano-string morphology of laser off-normal deposited amorphous cobalt films with controlled magnetic anisotropy

“…The Pulsed Laser Deposition, PLD, technique allows one to produce amorphous films [1], in our case soft magnetic Co ones [2]. For sputtered Co films the induction of controlled magnetic anisotropy by offnormal deposition technique has been investigated [3,4], attributing its origin to the shape effect produced by the ''self-shadowing'' growing of the films.…”

Quantitative model for tunable microstructure in magnetic FePt thin films by pulsed laser deposition

“…The laser fluency was kept at ∼ 3 − 4 J/cm 2 , but taking into account optical path losses and laser beam homogenization, the fluency of ∼ 2 J/cm 2 is more realistic estimation. To facilitate nearly equiatomic composition in the FePt epitaxial superlattices (see, for example, [25,26]), the number of laser shots on the targets per one deposition period was 34 for Fe and 18 for Pt (taking into account different ablation [27,28] and reevaporation properties for Fe and Pt) with 12 periods in total. The composition of the films was verified by Energy Dispersive X-Ray Spectroscopy over the film surfaces.…”

Laser ablated pure non-crystalline Co thin films for inductors for ultra-high frequencies

“…Ferromagnetic elements in the amorphous state have attracted interest from both the theoretical and the applied points of view [1][2][3][4][5][6][7][8][9]. Different techniques have shown the possibility of producing these kind of materials; in particular, the pulsed laser ablation deposition method, PLAD, is one of the most versatile method for preparing non-crystalline solids [7] and thin fihns of pure ferromagnetic elements at room temperature [8][9], exhibiting interesting magnetic and electrical properties.…”