1965
DOI: 10.1016/0038-1101(65)90074-2
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Gallium arsenide MOS transistors

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Cited by 96 publications
(18 citation statements)
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“…If Si MOSFETs worked so well, III-V MOSFETs should work even better, or so was the thinking. Claims of working III-V MOSFETs date back from as early as 1965 [19]. Yet, in spite of strong interest, III-V MOSFETs never became a mature commercial technology.…”
Section: Towards Thz Ingaas Fetsmentioning
confidence: 99%
“…If Si MOSFETs worked so well, III-V MOSFETs should work even better, or so was the thinking. Claims of working III-V MOSFETs date back from as early as 1965 [19]. Yet, in spite of strong interest, III-V MOSFETs never became a mature commercial technology.…”
Section: Towards Thz Ingaas Fetsmentioning
confidence: 99%
“…Any gate dielectric on GaAs has to be able to unpin the Fermi level and be thermodynamically stable with the semiconductor. Various approaches involving a number of oxidation techniques on GaAs and deposition of various passivating layers have resulted in pinned Fermi levels [1][2][3][4][5][6]. It was not until 1994 that the basic signatures required for MOSFET operation on GaAs such as inversion (under light illumination) and accumulation were observed on MOS capacitors [7].…”
Section: Introductionmentioning
confidence: 99%
“…Specifically, device modeling of III-V based MOSFETs through Monte Carlo simulation has demonstrated higher drive current for a given supply voltage compared with equivalent geometry Si MOSFETs [3]. In the past, the ability to reap the benefits of the high mobility III-V system for n-MOS applications has been hampered by the lack of a device quality gate oxide [4,5]. Recent work utilizing an MBE grown Ga 2 O 3 /(Ga x Gd 1-x ) 2 O 3 dielectric stack (GGO) on GaAs however has demonstrated interface state densities sufficiently low to unpin the Fermi level at the oxide/semiconductor interface [6][7][8].…”
Section: Introductionmentioning
confidence: 99%