2012 24th International Symposium on Power Semiconductor Devices and ICs 2012
DOI: 10.1109/ispsd.2012.6229074
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GaN-based bidirectional Super HFETs Using polarization junction concept on insulator substrate

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Cited by 20 publications
(18 citation statements)
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“…Polarization Superjunction (PSJ) is a unique technique to achieve charge balance not through impurity‐based doping control, but by engineering of positive and negative polarization charges inherent in the GaN material. PSJ technology is based on a GaN/AlGaN/GaN double heterostructure (grown along the (0001) crystal axis), where positive and negative polarization charges coexist at the AlGaN (0001¯)/GaN(0001) interface with two‐dimensional electron gas (2DEG) accumulation and GaN(0001¯)/AlGaN(0001) interface with two‐dimensional hole gas (2DHG) accumulation, respectively . The basic concept/structure has been illustrated in Fig.…”
Section: Polarization Superjunctionmentioning
confidence: 99%
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“…Polarization Superjunction (PSJ) is a unique technique to achieve charge balance not through impurity‐based doping control, but by engineering of positive and negative polarization charges inherent in the GaN material. PSJ technology is based on a GaN/AlGaN/GaN double heterostructure (grown along the (0001) crystal axis), where positive and negative polarization charges coexist at the AlGaN (0001¯)/GaN(0001) interface with two‐dimensional electron gas (2DEG) accumulation and GaN(0001¯)/AlGaN(0001) interface with two‐dimensional hole gas (2DHG) accumulation, respectively . The basic concept/structure has been illustrated in Fig.…”
Section: Polarization Superjunctionmentioning
confidence: 99%
“…The fundamental requirement of a semiconductor technology platform that enables the simultaneous development of a wide range of high voltage and low voltage devices in GaN as required for integration is served by the PSJ platform . Unlike GaN‐on‐Si, GaN‐on‐sapphire does not suffer from crosstalk issues, due to the excellent insulating properties of sapphire.…”
Section: Polarization Superjunctionmentioning
confidence: 99%
“…In addition, the conventional REduced SURface Field (RESURF) concept commonly employed in silicon technology has been demonstrated in GaN HEMT [14]. Moreover, the polarization junction (PJ) consisting of the two-dimensional hole gas (2DHG) above the 2DEG is proposed to improve the relationship between specific on-resistance (R ON,SP ) and BV [15][16][17][18]. GaN-based devices based on the PJ concept have been demonstrated on Sapphire and SiC substrate, while the high cost and small diameters of the GaN on SiC substrates go against the mass commercial application.…”
Section: Introductionmentioning
confidence: 99%
“…1b. With on-state characteristics as in conventional AlGaN/GaN HFETs utilising the 2DEG for conduction, PSJ technology employs an inherent charge balance in the heterostructure to enhance the blocking voltage capability for a given drift length [5][6][7][8]. As also demonstrated in the circuit models of PSJ HFET, its base terminal can be connected to a source terminal internally to form a three-terminal device and operates in the same way as conventional HFET.…”
Section: Introductionmentioning
confidence: 99%