GaSb-based Micro-Mechanical External-Cavity Laser Emitting around 2.3¿m

Geerlings, E.; Rattunde, M.; Schmitz, J.; Kaufel, G.; Wagner, J.; Kallweit, David; Zappe, Hans

doi:10.1109/omems.2006.1708242

Cited by 6 publications

(1 citation statement)

References 3 publications

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“…Previously, we developed an electromagnetically driven two-axis MEMS mirror scanner [3,4] and a spectrometer implemented as a tilting grating [5]. Other reports on MEMS-type spectrometers include piezoelectrically or electrostatically actuated scanning-type spectrometers [6][7][8], spectrometers based on in-plane rotation [9], and Fabri-Perot-type spectrometers [10]. Many of these devices require application of a voltage ranging from tens to hundreds of volts, operate only in a single axis, or are driven by resonance.…”

Section: Introductionmentioning

confidence: 99%

Electromagnetically dual‐axis driven MEMS grating and its application to 3D profiling with near‐infrared low‐coherence interferometry

Watanabe

Takahashi

Abe

et al. 2013

Elect Comm in Japan

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We have investigated 3D profiling of the objects by a low-coherence optical interferometer using MEMS grating. This system, constructed with optical fibers and MEMS devices, is a Fourier domain interferometer, which can discriminate distance to the object by wavelength analysis of the interference spectra. A MEMS mirror gives the object 2D optical scanning, and a MEMS grating permits spectroscopy of interference spectra. The MEMS grating can tilt to dual axis with electromagnetic force induced by planar coils and a permanent magnet. One axis tilting enables near-infrared spectroscopy and another axis tilting functions as optical axis alignment in an interferometer. Fabricated MEMS grating could tilt ±3.5° (mech.)/less than ± 10 mA in both directions at low frequency, which were equivalent to approximately 1400 to 1700 nm in wavelength. The interferometer, whose S/N was 50 dB and vertical standard deviation was 0.6 µm, could scan full wavelength width (1400 to 1700 nm) in 25 ms. Finally, we could realize 3D profiling which was not only surface reflection profiling of 1-µm step, but also transparent profiling of IC process layer from the wafer backside. © 2013 Wiley Periodicals, Inc. Electron Comm Jpn, 96(2): 9-15, 2013; Published online in Wiley Online Library (wileyonlinelibrary.com).

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Section: Introductionmentioning

confidence: 99%

Electromagnetically dual‐axis driven MEMS grating and its application to 3D profiling with near‐infrared low‐coherence interferometry

Watanabe

Takahashi

Abe

et al. 2013

Elect Comm in Japan

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MEMS‐ andMOEMS‐Based Near‐Infrared Spectrometers

Antila

Tuohiniemi

Rissanen

et al. 2000

Encyclopedia of Analytical Chemistry

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The trend in near‐infrared (NIR) spectroscopy is to go toward on‐site, in‐field, on‐the‐go applications with calibration‐free instruments and off‐the‐shelf chemometrics software. Micro‐electro‐mechanical systems (MEMS) and micro‐opto‐electro‐mechanical systems (MOEMS) represent manufacturing techniques and components, capable of enabling highly miniaturized, robust, and low‐cost sensors and actuators. This article presents common MEMS and MOEMS manufacturing techniques and gives an insight into the demands of NIR spectroscopic applications. The main instrument categories are covered by a short theory followed by examples. Most thoroughly handled topics are Fourier transform spectrometers (FTSs), Fabry–Perot interferometers (FPIs), and dispersive spectrometers. Two other categories are also separately presented, namely light modulator systems and tunable MEMS light sources. We give an overview on NIR spectroscopy and its special requirements regarding the realization of MEMS spectrometers.

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MEMS‐ and MOEMS‐Based Visible and Near‐Infrared Spectrometers

Antila¹,

Tuohiniemi²,

Rissanen³

et al. 2021

Encyclopedia of Analytical Chemistry

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The trend in near‐infrared (NIR) spectroscopy is to go toward on‐site, in‐field, on‐the‐go applications with calibration‐free instruments and off‐the‐shelf chemometrics software. Micro‐electro‐mechanical systems (MEMS) and micro‐opto‐electro‐mechanical systems (MOEMS) represent manufacturing techniques and components, capable of enabling highly miniaturized, robust, and low‐cost sensors and actuators. This article presents common MEMS and MOEMS manufacturing techniques and gives an insight into the demands of NIR spectroscopic applications. The main instrument categories are covered by a short theory followed by examples. Most thoroughly handled topics are Fourier‐transform spectrometers (FTSs), Fabry–Perot interferometers (FPIs), and dispersive spectrometers. Two other categories are also separately presented, namely light modulator systems and tunable MEMS light sources. We give an overview on NIR spectroscopy and its special requirements regarding the realization of MEMS spectrometers.

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GaSb-based Micro-Mechanical External-Cavity Laser Emitting around 2.3¿m

Abstract: We report on GaSb-based quantum-well diode lasers in a micro-machined external cavity setup using the Littrowconfiguration. An electrostatically actuated Si -grating, optimized to achieve a wide tuning range in the 2.3 µm wavelength range, is used as a tuning element.

Cited by 6 publications

References 3 publications

Electromagnetically dual‐axis driven MEMS grating and its application to 3D profiling with near‐infrared low‐coherence interferometry

Electromagnetically dual‐axis driven MEMS grating and its application to 3D profiling with near‐infrared low‐coherence interferometry

MEMS‐ andMOEMS‐Based Near‐Infrared Spectrometers

MEMS‐ and MOEMS‐Based Visible and Near‐Infrared Spectrometers

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