“…MoO 3 find applications as a cathode material in the development of high energy density solid state microbatteries and in electrochromic devices [5,6]. So far, thin film deposition techniques explored for the preparation of MoO 3 films includes the thermal evaporation [7,8], electron beam evaporation [6,9,10], pulsed laser deposition [4,11], electro deposition [12], sputtering [13][14][15][16], metal organic chemical vapour deposition [17], spray pyrolysis [18] and sol-gel process [19]. Among these methods, dc magnetron sputtering received considerable attention from the technological point of view because of the advantage in generation of films at low temperatures with required chemical composition on large area substrates.…”