2014
DOI: 10.1109/ted.2014.2362850
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Gate Bias Stress-Induced Threshold Voltage Shift Effect of a-IGZO TFTs with Cu Gate

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Cited by 22 publications
(2 citation statements)
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“…The typical performance of the IGZO TFTs with a similar structure prepared by conventional DC or RF magnetron sputtering are summarized in Table 4 for comparison. When fabricated by DC or RF MS at room temperature, the TFTs exhibited an inferior performance [ 19 , 20 ] Generally, a post-annealing treatment at 250–450 °C is required to improve the performance [ 19 , 20 , 21 , 22 , 23 , 24 ]. In contrast, the IGZO TFTs prepared by HiPIMS have a small SS value, even if they were fabricated at room temperature without post-annealing or other treatment, implying that the defects in the IGZO channel were reduced.…”
Section: Resultsmentioning
confidence: 99%
“…The typical performance of the IGZO TFTs with a similar structure prepared by conventional DC or RF magnetron sputtering are summarized in Table 4 for comparison. When fabricated by DC or RF MS at room temperature, the TFTs exhibited an inferior performance [ 19 , 20 ] Generally, a post-annealing treatment at 250–450 °C is required to improve the performance [ 19 , 20 , 21 , 22 , 23 , 24 ]. In contrast, the IGZO TFTs prepared by HiPIMS have a small SS value, even if they were fabricated at room temperature without post-annealing or other treatment, implying that the defects in the IGZO channel were reduced.…”
Section: Resultsmentioning
confidence: 99%
“…Secondly, the operation of GOA circuits needs more stable and uniform TFTs compared to that of pixel switches, especially for large size TV applications [11]. Small threshold voltage variation of a-IGZO TFTs induced by processes or long-term operation might result in deterioration of the circuits [12], [13]. To address these issues, many circuit designs have been proposed in the past, which, however, increase the circuit complexity and thus the layout area [14]- [17].…”
Section: Introductionmentioning
confidence: 99%