Southcon/96 Conference Record
DOI: 10.1109/southc.1996.535099
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Gate-oxide thickness effects on hot-carrier-induced degradation in n-MOSFETs

Abstract: The Gate-oxide thickness effects on hot-carrier-induced degradation have been investigated for submicron MOSFETs. A thinner gate oxide gives a higher substrate current, but reduced hot electron effects. This is because the thin-gate-oxide device has smaller mobility and threshold voltage degradation due to a shift of damaged interface region towards the drain contact. In this work, the analytical substrate and drain current model has been derived. The model predictions have good agreement with the experimental… Show more

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Cited by 2 publications
(2 citation statements)
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“…In addition, 180 nm Si of Figure 6 b shows 2.85% and 2.32% for the basic size and the double channel widths, respectively. The maximum amplitude variations could be generated by induced γ-ray radiation, as considered with previous results [ 7 ] and Equations (8) and (9), thus this phenomenon is related to the steady decline of trans-conductance, including a threshold voltage term, and the steady increase of the output resistance [ 28 , 29 ]. Moreover, Figure 6 a,b shows that increasing the channel width without modifying fabrication processes could deliver more radiation tolerance against amplitude variations.…”
Section: Resultssupporting
confidence: 55%
“…In addition, 180 nm Si of Figure 6 b shows 2.85% and 2.32% for the basic size and the double channel widths, respectively. The maximum amplitude variations could be generated by induced γ-ray radiation, as considered with previous results [ 7 ] and Equations (8) and (9), thus this phenomenon is related to the steady decline of trans-conductance, including a threshold voltage term, and the steady increase of the output resistance [ 28 , 29 ]. Moreover, Figure 6 a,b shows that increasing the channel width without modifying fabrication processes could deliver more radiation tolerance against amplitude variations.…”
Section: Resultssupporting
confidence: 55%
“…When the gate oxide is thinner, the gate will be able to control the channel more efficiently. Also, as the gate oxide becomes thinner, the damaged interface region from hot carrier effects is moved into the drain region [33]. This reduces the hot electron effect on the device as the effective damage length in the active channel will be reduced [33].…”
Section: Equation 3-1 = • ≡ •mentioning
confidence: 99%