General design equations for the rotational stiffness, maximal angular deflection and rotational precision of various notch flexure hinges

Linß, Sebastian; Schorr, Philipp; Zentner, Lena

doi:10.5194/ms-8-29-2017

Cited by 55 publications

(29 citation statements)

References 38 publications

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“…These models, in general, are based on assumption that deflections and final performance characteristics of compliant mechanisms are linear within the range of validity of Hooke's law. But results from ordinary used linear models and real measured data differ up to 3-10% [2].…”

Section: Introductionmentioning

confidence: 94%

Verifying the Performance Characteristics of the (micro) Robotic Devices

Hricko¹,

Havlik²,

Karavaev³

2020

Nelin. Dinam.

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The paper is focused to design, simulation and modeling of the compact compliant structures widely used in construction of robotic devices. As the illustrative example it is proposed mechanism for reduction of motion, which enables to improve the accuracy of the positioning system. The physical model is fabricated by 3D printing technology. Its proposed performance characteristics are verified by measurement on the experimental test bed by using laser distance sensors and image sensing/processing technology.

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Section: Introductionmentioning

confidence: 94%

Verifying the Performance Characteristics of the (micro) Robotic Devices

Hricko¹,

Havlik²,

Karavaev³

2020

Nelin. Dinam.

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“…A two-stage design procedure was adopted, where the basic sensor's dimensions were calculated by analytical approaches. Then the dimensions and structure optimization procedure were carried out by FEM analysis in Comsol Multiphysics as a consequence of different results from analytical and numerical calculations (3-10% for one flexure element [8]).…”

Section: Mechanical Designmentioning

confidence: 99%

MEMS Sensor of Force

Hart'anský¹,

Hricko²,

Mierka³

et al. 2020

Nelin. Dinam.

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“…The optimal design of flexure hinges in microgripper structures has been investigated in multiple works [34][35][36][37][38]. In the 'hot and cold arm' design, the ratio of the flexure length to the hot arm length is one of the design parameters that influences the maximum deflection achieved at the microgripper arm tips.…”

Section: Microgripper Design Variants and Principle Of Operationmentioning

confidence: 99%

The Effects of Structure Thickness, Air Gap Thickness and Silicon Type on the Performance of a Horizontal Electrothermal MEMS Microgripper

et al. 2018

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The ongoing development of microelectromechanical systems (MEMS) over the past decades has made possible the achievement of high-precision micromanipulation within the micromanufacturing, microassembly and biomedical fields. This paper presents different design variants of a horizontal electrothermally actuated MEMS microgripper that are developed as microsystems to micromanipulate and study the deformability properties of human red blood cells (RBCs). The presented microgripper design variants are all based on the U-shape 'hot and cold arm' actuator configuration, and are fabricated using the commercially available Multi-User MEMS Processes (MUMPs R ) that are produced by MEMSCAP, Inc. (Durham, NC, USA) and that include both surface micromachined (PolyMUMPs TM ) and silicon-on-insulator (SOIMUMPs TM ) MEMS fabrication technologies. The studied microgripper design variants have the same in-plane geometry, with their main differences arising from the thickness of the fabricated structures, the consequent air gap separation between the structure and the substrate surface, as well as the intrinsic nature of the silicon material used. These factors are all inherent characteristics of the specific fabrication technologies used. PolyMUMPs TM utilises polycrystalline silicon structures that are composed of two free-standing, independently stackable structural layers, enabling the user to achieve structure thicknesses of 1.5 µm, 2 µm and 3.5 µm, respectively, whereas SOIMUMPs TM utilises a 25 µm thick single crystal silicon structure having only one free-standing structural layer. The microgripper design variants are presented and compared in this work to investigate the effect of their differences on the temperature distribution and the achieved end-effector displacement. These design variants were analytically studied, as well as numerically modelled using finite element analysis where coupled electrothermomechanical simulations were carried out in CoventorWare R (Version 10, Coventor, Inc., Cary, NC, USA). Experimental results for the microgrippers' actuation under atmospheric pressure were obtained via optical microscopy studies for the PolyMUMPs TM structures, and they were found to be conforming with the predictions of the analytical and numerical models. The focus of this work is to identify which one of the studied design variants best optimises the microgripper's electrothermomechanical performance in terms of a sufficient lateral tip displacement, minimum out-of-plane displacement at the arm tips and good heat transfer to limit the temperature at the cell gripping zone, as required for the deformability study of RBCs.

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General design equations for the rotational stiffness, maximal angular deflection and rotational precision of various notch flexure hinges

Cited by 55 publications

References 38 publications

Verifying the Performance Characteristics of the (micro) Robotic Devices

Verifying the Performance Characteristics of the (micro) Robotic Devices

MEMS Sensor of Force

The Effects of Structure Thickness, Air Gap Thickness and Silicon Type on the Performance of a Horizontal Electrothermal MEMS Microgripper

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