Generation of electron cyclotron resonance plasmas using a circular TE01 mode microwave

Abstract

An electron cyclotron resonance plasma using a circular TE01 mode microwave is generated to achieve larger diameters. It is shown that the input power of the circular TE01 mode is efficiently consumed to generate electron cyclotron resonance plasmas. The density and temperature of electrons is around 1012 cm−3 and 3–5 eV at 5 kW input power, respectively.

Generating large-area uniform microwave field for plasma excitation

“…Microwave can be used to generate various plasma sources based on different mechanisms, like microwave plasma systems [1][2][3][4][5] and electron cyclotron resonance (ECR) systems. [6][7][8][9][10][11] It can also be employed directly to process or anneal materials, such as ceramics, ferrites, thin films, or even metal powders. [12][13][14][15][16][17][18][19][20][21][22][23] Thus, exciting large-area and uniform microwave field has been pressingly required for many applications.…”