Production of electron cyclotron resonance plasma for uniform deposition using a TE01 mode microwave

Hidaka, Ryota; Yamaguchi, Toru; Tsuruta, Akihisa; Tanaka, Masayoshi Y.; Kawai, Yoshinobu

doi:10.1063/1.1144897

Review of Scientific Instruments

1994

DOI: 10.1063/1.1144897

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Production of electron cyclotron resonance plasma for uniform deposition using a TE01 mode microwave

Ryota Hidaka

Toru Yamaguchi

Akihisa Tsuruta

et al.

Abstract: Articles you may be interested inElectron cyclotron resonance plasma production by using pulse mode microwaves and dependences of ion beam current and plasma parameters on the pulse conditiona) Rev. Sci. Instrum. 83, 02A324 (2012); 10.1063/1.3669792Production of highly uniform electron cyclotron resonance plasmas by distribution control of the microwave electric field Hard boron oxide thinfilm deposition using electron cyclotron resonance microwave plasmas

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Cited by 3 publications

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Electron cyclotron resonance applicator of the Wilkinson microwave power divider type for large diameter ion sources

Fusellier¹,

Wartski²,

Coste³

et al. 1998

Review of Scientific Instruments

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We have designed and tested a new model of coaxial 2.45 GHz electron cyclotron resonance (ECR) ion source based on the splitting of the microwave power traveling along a coaxial line into a set of periodically distributed antennas. Our motivation was the study of the scaling-up feasibility of a coaxially fed ion source in which it is desirable to circumvent the transverse electric and magnetic (TEM) mode conversion into azimuthally unsymmetrical higher-order modes. Another important characteristic of this source is the possible incorporation of permanent magnets into the individual antennas in order to create the ECR zones around the latter. The validity of these concepts was tested on a 5 cm in external diameter coaxial ECR ion source in which the single thick coaxial antenna was replaced by a set of quarter wavelength magnetized rod antennas in order to enhance the magnetic field created by the external splitted ring magnets. For an incident power of 100 W and an argon pressure of 1.2×10−4 mbar, a 500 eV singly charged ion beam with a current density of 1 mA/cm2 was delivered through an accel-decel set of grids. Implementation of a scaled-up 20 cm in diameter ion source is in progress.

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Electron cyclotron resonance applicator of the Wilkinson microwave power divider type for large diameter ion sources

Fusellier¹,

Wartski²,

Coste³

et al. 1998

Review of Scientific Instruments

View full text Add to dashboard Cite

show abstract

Spatial Distribution and Transport of an Electron Cyclotron Resonance Plasma Generated Using Dominant-Mode Microwave

Watanabe

Furuse

Usui

et al. 1995

Jpn. J. Appl. Phys.

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The state-selective dissociation dynamics for anionic and excited neutral fragments of gaseous SiCl 4 following Cl 2p and Si 2p core-level excitations were characterized by combining measurements of the photoninduced anionic dissociation, x-ray absorption and UV/visible dispersed fluorescence. The transitions of core electrons to high Rydberg states/doubly excited states in the vicinity of both Si 2p and Cl 2p ionization thresholds of gaseous SiCl 4 lead to a remarkably enhanced production of anionic, Si − and Cl − , fragments and excited neutral atomic, Si * , fragments. This enhancement via core-level excitation near the ionization threshold of gaseous SiCl 4 is explained in terms of the contributions from the Auger decay of doubly excited states, shake-modified resonant Auger decay, or/and post-collision interaction. These complementary results provide insight into the state-selective anionic and excited neutral fragmentation of gaseous molecules via core-level excitation.

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Spatial Distribution Measurement of Microwave Electric Field Using Thermal Sensitive Paper in a Microwave Etching System

Watanabe

Furuse

Watanabe

et al. 1995

Jpn. J. Appl. Phys.

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The deflection of light from distant sources by the foreground mass distribution can be quantified and mined for interesting cosmological information. Within the last decade, observers have moved from making the first detections of this phenomenon to planning ambitious future surveys. These surveys may teach us much about fundamental physics such as dark energy and neutrino mass. After a qualitative review of some of this, we present new results regarding the accuracy with which cluster masses can be determined through a detailed study of the way in which the clusters distort the cosmic microwave background. PACS numbers: 95.30.Sf, 98.80.Bp, 98.80.Es

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Production of electron cyclotron resonance plasma for uniform deposition using a TE01 mode microwave

Cited by 3 publications

References 12 publications

Electron cyclotron resonance applicator of the Wilkinson microwave power divider type for large diameter ion sources

Electron cyclotron resonance applicator of the Wilkinson microwave power divider type for large diameter ion sources

Spatial Distribution and Transport of an Electron Cyclotron Resonance Plasma Generated Using Dominant-Mode Microwave

Spatial Distribution Measurement of Microwave Electric Field Using Thermal Sensitive Paper in a Microwave Etching System

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