Generation of Spatially Coherent Light at Extreme Ultraviolet Wavelengths

Bartels, Randy A.; Paul, Ariel; Green, Hans; Kapteyn, Henry C.; Murnane, Margaret M.; Backus, Sterling; Christov, Ivan P.; Liu, Yanwei; Attwood, David; Jacobsen, Chris

doi:10.1126/science.1071718

Cited by 382 publications

(202 citation statements)

References 30 publications

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“…Synchrotron sources can produce short-pulse ($100 fs) X-rays when operated as femtosecond slicing sources 8 , but produce comparatively weak X-ray beams of 1 Â 10 7 photons per second. Along with X-ray pulses from femtosecond laser plasma sources 9,10 and high-harmonic-generation sources 11 this limits their use to non-destructive phenomena where weak signals can be accumulated over many repeatable excitations of the sample.…”

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confidence: 99%

Ultrafast single-shot diffraction imaging of nanoscale dynamics

et al. 2008

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The transient nanoscale dynamics of materials on femtosecond to picosecond timescales is of great interest in the study of condensed phase dynamics such as crack formation, phase separation and nucleation, and rapid fluctuations in the liquid state or in biologically relevant environments. The ability to take images in a single shot is the key to studying non-repetitive behaviour mechanisms, a capability that is of great importance in many of these problems. Using coherent diffraction imaging with femtosecond X-ray free-electron-laser pulses we capture time-series snapshots of a solid as it evolves on the ultrafast timescale. Artificial structures imprinted on a Si 3 N 4 window are excited with an optical laser and undergo laser ablation, which is imaged with a spatial resolution of 50 nm and a temporal resolution of 10 ps. By using the shortest available free-electronlaser wavelengths 1 and proven synchronization methods 2 this technique could be extended to spatial resolutions of a few nanometres and temporal resolutions of a few tens of femtoseconds. This experiment opens the door to a new regime of time-resolved experiments in mesoscopic dynamics.To date, optical pulses have made it possible to resolve dynamics on the femtosecond timescale, but the spatial resolution of these studies has been limited to a few micrometres 3 . On the other hand, femtosecond X-ray pulses have been used to detect Å ngstrom-scale atomic motions in extended crystalline materials with long-range order through time-resolved diffraction experiments 4,5 . An entirely different methodology is needed to investigate the ultrafast dynamics of non-crystalline materials at nanometre length scales. Applications at these scales can be found in the study of fracture dynamics, shock formation, spallation, ablation, and plasma formation under extreme conditions. In the solid state it is desirable to directly image dynamic processes such as nucleation and phase growth, phase fluctuations and various forms of electronic or magnetic segregation.Electron microscopes can provide nanometre to atomic resolution, and have recently been demonstrated with ultrafast pulses 6 . However, they have limited penetrating power and struggle to obtain high-quality single-shot images due to space-charge issues 7 . Synchrotron beams from third-generation sources have comparatively long pulse lengths of 10-100 ps, as determined by the shortest electron bunch length possible in a given storage ring. Synchrotron sources can produce short-pulse ($100 fs) X-rays when operated as femtosecond slicing sources 8 , but produce comparatively weak X-ray beams of 1 Â 10 7 photons per second. Along with X-ray pulses from femtosecond laser plasma sources 9,10 and high-harmonic-generation sources 11 this limits their use to non-destructive phenomena where weak signals can be accumulated over many repeatable excitations of the sample.The intense femtosecond X-ray pulses from free-electron-laser (FEL) sources provide the penetrating power, spatial resolution and single-shot imaging c...

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confidence: 99%

Ultrafast single-shot diffraction imaging of nanoscale dynamics

et al. 2008

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“…In particular, by combining coherent, short-wavelength beams from either high harmonic generation (HHG) [10] or X-ray free electron lasers (XFELs) [11] with coherent diffractive imaging (CDI) [12][13][14][15], it is now possible to reach near-wavelength resolution imaging in the EUV and X-ray regions for the first time [16,17]. Accordingly, CDI has found a range of applications in transmission and reflection geometries [18][19][20] to investigate nanoscale strain [21,22], semiconductor structures [18], and for biological imaging [23][24][25].…”

Section: Introductionmentioning

confidence: 99%

Quantitative Chemically Specific Coherent Diffractive Imaging of Reactions at Buried Interfaces with Few Nanometer Precision

et al. 2016

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Characterizing buried layers and interfaces is critical for a host of applications in nanoscience and nano-manufacturing. Here we demonstrate non-invasive, non-destructive imaging of buried interfaces using a tabletop, extreme ultraviolet (EUV), coherent diffractive imaging (CDI) nanoscope. Copper nanostructures inlaid in SiO2 are coated with 100 nm of aluminum, which is opaque to visible light and thick enough that neither optical microscopy nor atomic force microscopy can image the buried interfaces. Short wavelength (29 nm) high harmonic light can penetrate the aluminum layer, yielding high-contrast images of the buried structures. Moreover, differences in the absolute reflectivity of the interfaces before and after coating reveal the formation of interstitial diffusion and oxidation layers at the Al-Cu and Al-SiO2 boundaries. Finally, we show that EUV CDI provides a unique capability for quantitative, chemically-specific imaging of buried structures, and the material evolution that occurs at these buried interfaces, compared with all other approaches.

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“…It is usually recorded on a flat surface, but contains the information about the entire three-dimensional wave field. The first soft x-ray hologram with a high harmonics source was made by Bartels and collaborators in 2002 [4]. They obtained a resolution of 8 m. The advantages of this source are to be tabletop and intrinsically spatially coherent.…”

Section: Holography Experimentsmentioning

confidence: 99%

“…This development is motivated by the large field of applications as microscopy [1], phase contrast imaging [2] and holography [3,4]. These sources have demonstrated a high brightness [5] and high degree spatial coherence [7].…”

Section: Introductionmentioning

confidence: 99%

High harmonics generation: Spatial characterisation and applications

Gautier

Zeitoun

Morlens

et al. 2009

UVX 2008 - 9e Colloque Sur Les Sources Cohérentes Et Incohérentes UV, VUV Et X : Applications Et Développements Récents

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Abstract. We present a full optimization of the high harmonics wave-front thanks to the use of a soft x-ray Hartmann sensor. The sensor was calibrated using high harmonics source with a /50 accuracy. We observed relatively good high harmonics wave-front, two times the diffraction-limit, with astigmatism as the dominant aberration for any interaction parameters.The influence of high harmonic generation parameters was also studied in particularly the influence of the infra-red wave-front. This wave front quality allows applications by focalization of this beam. We present experiment we performed on damage target and holography.

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Generation of Spatially Coherent Light at Extreme Ultraviolet Wavelengths

Cited by 382 publications

References 30 publications

Ultrafast single-shot diffraction imaging of nanoscale dynamics

Ultrafast single-shot diffraction imaging of nanoscale dynamics

Quantitative Chemically Specific Coherent Diffractive Imaging of Reactions at Buried Interfaces with Few Nanometer Precision

High harmonics generation: Spatial characterisation and applications

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