2000
DOI: 10.1109/19.872918
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Geometrical error compensation of precision motion systems using radial basis function

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Cited by 34 publications
(30 citation statements)
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“…It is a key objective to attain improved compensation performance with less or comparable memory, using this approach. The individual geometrical error component will be decomposed into forward and reverse ones, when they are significantly different, instead of simply taking the mean as in the conventional approach and Tan et al (2000). Real machine measurements, to be provided in this paper, will strongly reinforce this necessity.…”
Section: Introductionmentioning
confidence: 90%
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“…It is a key objective to attain improved compensation performance with less or comparable memory, using this approach. The individual geometrical error component will be decomposed into forward and reverse ones, when they are significantly different, instead of simply taking the mean as in the conventional approach and Tan et al (2000). Real machine measurements, to be provided in this paper, will strongly reinforce this necessity.…”
Section: Introductionmentioning
confidence: 90%
“…In this paper, the results in Tan et al (2000) are extended to a general case using multilayer NNs. It is a key objective to attain improved compensation performance with less or comparable memory, using this approach.…”
Section: Introductionmentioning
confidence: 97%
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“…Precision control of an XY-table is an important problem in manufacturing, and transfer functions for the linear relation between the x and y components of the motion and the corresponding motor input currents for the table used in [8] were given in [14]. Representing these in state space form and combining them as two decoupled SISO systems yields a MIMO system Σ 1 in the form (1) Thus the problem is for the pencil to draw a circle, commencing from the origin in xy-coordinates.…”
Section: Nonovershooting and Nonundershooting Output Regulationmentioning
confidence: 99%