Geometrical optimization of resonant cantilevers vibrating in in-plane flexural modes

Beardslee, Luke A.; Addous, Assim M.; Demirci, K.S.; Brand, Oliver; Heinrich, Stephen M.; Josse, Fabien

doi:10.1109/icsens.2010.5689930

Cited by 9 publications

(10 citation statements)

References 13 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…In liquid, losses due to the fluid damping dominate over internal material losses for silicon based microstructures. In air, Q-factors up to 1500 have been measured for the first out-of-plane bending mode [28]. In water, Q-factors of silicon-based microcantilevers rarely exceed 2-20 due to the substantial viscous damping caused by the fluid.…”

Section: Q-factor Optimization In Liquidmentioning

confidence: 99%

Optimization of the performances of SU-8 organic microcantilever resonators by tuning the viscoelastic properties of the polymer

Dubourg¹,

Dufour²,

Pellet³

et al. 2012

Sensors and Actuators B: Chemical

View full text Add to dashboard Cite

This paper describes a promising method to improve the performances of organic resonant microcantilevers. This method is based on the tuning of the viscoelastic properties of the material by controlling internally the temperature of the structure. Actuation of the SU-8 free-standing microstructures has been integrated by means of electromagnetic forces while a static resistive thermal effect, obtained by applying a DC current in a conducting path, has been used to control the temperature of the structure. Investigation of the electromagnetic and thermal influence on the static and dynamic behavior has shown that the thermal effect dominates the electromagnetic one in static mode and inversely in dynamic mode. As a result, by applying a constant heating of the structure, the viscoelastic properties of polymers have been tuned, and the quality factor of SU-8 microcantilevers has been thereby enhanced by a factor 2 in air and 2.25 in liquid.

show abstract

Section: Q-factor Optimization In Liquidmentioning

confidence: 99%

Optimization of the performances of SU-8 organic microcantilever resonators by tuning the viscoelastic properties of the polymer

Dubourg¹,

Dufour²,

Pellet³

et al. 2012

Sensors and Actuators B: Chemical

View full text Add to dashboard Cite

show abstract

“…It is especially important in those applications involving viscous media, since damping is highly increased and only resonators with high quality factors are capable of working under such conditions. This is the reason why this resonator was specially designed to optimize the in-plane modes, since such modes suffer a lower damping in liquid media (Beardslee et al 2010). Once the optimization of inplane modes has been confirmed by the experimental results, it is necessary to determine the quality factor of the resonator.…”

Section: Quality Factorsmentioning

confidence: 99%

Selective modal excitation in coupled piezoelectric microcantilevers

Gil¹,

Manzaneque²,

Hernando-García³

et al. 2012

Microsyst Technol

View full text Add to dashboard Cite

We study in detail the first vibration modes of a piezoelectric resonator based on two coupled micro-cantilevers, also known as tuning-forks. A multiple electrode geometry lying on a layer of piezoelectric AlN allows the selective excitation of different modes, including in-plane modes. A complete optical characterization of the devices in the z-and also the x-direction has been performed employing a Doppler vibrometer. The measurements confirm the excitation and inhibition of different modes depending on the actuation signals distribution on the electrodes. The influence of the dimensions of the resonator on the coupling between the microcantilevers has also been studied. Quality factors above 4,300 have been measured for the first anti-phase in-plane mode.

show abstract

“…In consideration of better sensing response to in-plane vibration, the full piezoresistive Wheatstone bridge was created in a U-shaped layout instead of the conventional square-formed geometry [9]. Moreover, the cantilever sampling area was enlarged to collect more NPs.…”

Section: Finite Element Modeling (Fem)mentioning

confidence: 99%

“…These resonant sensors are intended to be operated in the fundamental in-plane resonant mode for obtaining higher quality factors (Q) [9]. For the excitation method, the designed silicon cantilever resonator is principally excited based on the electrically induced thermal expansion of its material.…”

Section: Resonator Designmentioning

confidence: 99%

Electrothermal piezoresistive cantilever resonators for personal measurements of nanoparticles in workplace exposure

Wasisto

Uhde

et al. 2015

SPIE Proceedings

View full text Add to dashboard Cite

Low-cost and low-power piezoresistive cantilever resonators with integrated electrothermal heaters are developed to support the sensing module enhancement of the second generation of handheld cantilever-based airborne nanoparticle (NP) detector (CANTOR-2). These sensors are used for direct-reading of exposure to carbon engineered nanoparticles (ENPs) at indoor workplaces. The cantilever structures having various shapes of free ends are created using silicon bulk micromachining technologies (i.e, rectangular, hammer-head, triangular, and U-shaped cantilevers). For a complete wearable CANTOR-2, all components of the proposed detector can be grouped into two main units depending on their packaging placements (i.e., the NP sampler head and the electronics mounted in a handy-format housing). In the NP sampler head, a miniaturized electrophoretic aerosol sampler and a resonant silicon cantilever mass sensor are employed to collect the ENPs from the air stream to the cantilever surfaces and measuring their mass concentration, respectively. After calibration, the detected ENP mass concentrations of CANTOR-2 show a standard deviation from fast mobility particle sizer (FMPS, TSI 3091) of 8-14%

show abstract

Geometrical optimization of resonant cantilevers vibrating in in-plane flexural modes

Cited by 9 publications

References 13 publications

Optimization of the performances of SU-8 organic microcantilever resonators by tuning the viscoelastic properties of the polymer

Optimization of the performances of SU-8 organic microcantilever resonators by tuning the viscoelastic properties of the polymer

Selective modal excitation in coupled piezoelectric microcantilevers

Electrothermal piezoresistive cantilever resonators for personal measurements of nanoparticles in workplace exposure

Contact Info

Product

Resources

About