2000
DOI: 10.1016/s0022-0248(00)00589-3
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Growth and structural analysis of nano-diamond films deposited on Si substrates pretreated by various methods

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Cited by 37 publications
(18 citation statements)
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“…The band centered at 1530 cm À1 consists of two sub-bands, one centered at 1480 and the second at 1570 cm À1 . Generally, the bands centered at 1150 and 1480 cm À1 are often assigned to the nanocrystalline character of diamond deposits [20,21]. Pfeiffer et al demonstrated that these bands can most probably be attributed to the presence of trans-polyacetylene segments located at the grain boundaries [22].…”
Section: Characteristics Of Patterned Ncd Films On Silicon Substratesmentioning
confidence: 99%
“…The band centered at 1530 cm À1 consists of two sub-bands, one centered at 1480 and the second at 1570 cm À1 . Generally, the bands centered at 1150 and 1480 cm À1 are often assigned to the nanocrystalline character of diamond deposits [20,21]. Pfeiffer et al demonstrated that these bands can most probably be attributed to the presence of trans-polyacetylene segments located at the grain boundaries [22].…”
Section: Characteristics Of Patterned Ncd Films On Silicon Substratesmentioning
confidence: 99%
“…The thermal energy is considered to be sufficient for depositing the ZrC film at 1500 1C. We considered that at lower temperatures ranging from 1200 to 1300 1C, gas species with a low thermal energy results in limited surface migration, which makes the nucleation sites easier than deposition on growth sites [15][16][17][18][19]. This seems to be reason that the reactants resulted in both whisker and film growth.…”
Section: Resultsmentioning
confidence: 99%
“…For these reasons, there is not only increasing scientific but also practical interest in the synthesis and characterization of nanocrystalline diamond (NCD) films with columnar grains on the nanometer scale (<100 nm). These NCD films possess smoother surfaces and lower friction coefficients than MCD films [1][2][3], which make them a better coating material for a variety of mechanical applications. Furthermore, their smoother surfaces and wide band gaps make them candidates for optical or electronic components.…”
Section: Introductionmentioning
confidence: 99%