2011 International Symposium on Applications of Ferroelectrics (ISAF/PFM) and 2011 International Symposium on Piezoresponse For 2011
DOI: 10.1109/isaf.2011.6014140
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Growth of high quality BiFeO<inf>3</inf> thin films by dual ion beam sputtering

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Cited by 2 publications
(3 citation statements)
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“…In addition, each BFO crystallite on each STO crystal has a single crystalline nature, similar to those on vicinal STO single crystals along [110]. 27,28) These XRD results suggest that BFO follows the bicrystal nature of the STO substrate, and that the crystallinity of each BFO crystallite is comparable to those grown on STO single crystals.…”
Section: Resultsmentioning
confidence: 84%
See 1 more Smart Citation
“…In addition, each BFO crystallite on each STO crystal has a single crystalline nature, similar to those on vicinal STO single crystals along [110]. 27,28) These XRD results suggest that BFO follows the bicrystal nature of the STO substrate, and that the crystallinity of each BFO crystallite is comparable to those grown on STO single crystals.…”
Section: Resultsmentioning
confidence: 84%
“…The epitaxial growth of BFO thin films prepared by sputtering has already been described in detail elsewhere. [26][27][28][29] Square Pt top electrodes (50 × 50 µm 2 ) were prepared on and off the boundary by sputtering and a lift-off process via electron beam lithography. The orientation and domain structure of BFO thin films were characterized by θ-2θ X-ray diffraction (XRD) measurement and reciprocal space mapping (RSM) using four circle X-ray diffractometers (PANalytical X'Pert MRD and Rigaku Smart Lab), and piezoresponse scanning force microscopy (PFM).…”
Section: Experimental Methodsmentioning
confidence: 99%
“…Details of the epitaxial growth, domain structures, and electrical properties of (001)-BFO thin films prepared by sputtering have already been described elsewhere. [29][30][31][32][33] The domain structures of BFO thin films were determined by X-ray diffraction reciprocal space mapping (XRD-RSM), lateral piezoresponse force microscopy (LPFM), vertical PFM (VPFM) and SNDM. XRD-RSM was performed using a four-circle X-ray diffractometer with Cu K¡ radiation (PANalytical X'pert MRD).…”
Section: Experimental Methodsmentioning
confidence: 99%