Growth of thin Al2O3 films on biaxially oriented polymer films by atomic layer deposition

Vähä-Nissi, Mika; Kauppi, Emilia; Sahagian, Khoren; Johansson, Leena‐Sisko; Peresin, María Soledad; Sievänen, Jenni; Harlin, Ali

doi:10.1016/j.tsf.2012.09.043

Cited by 17 publications

(3 citation statements)

References 28 publications

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“…With increasing ALD cycles, these islands can grow in three dimensions and eventually merge to form a continuous film. ALD has been demonstrated on poly(propylene) films and fibers in the context of this proposed mechanism …”

Section: Resultsmentioning

confidence: 89%

Janus Membranes via Diffusion‐Controlled Atomic Layer Deposition

Waldman

Yang

Mandia

et al. 2018

Adv Materials Inter

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The first use of atomic layer deposition (ALD) to produce Janus membranes is reported, with an example system consisting of a compositional gradient ranging from hydrophilic Al2O3 on one face to hydrophobic poly(propylene) on the opposite face. Alternating pulses of trimethyl aluminum and water vapor lead to the growth of covalently bonded Al2O3 conforming to the membrane pore surfaces. Precise control of ALD parameters significantly affects the surface wetting of the modified membrane face and the depth of Al2O3 infiltration into the porosity. This depth control derives from slow precursor diffusion through the 200 nm membrane pores compared to much faster ALD surface reactions. For a given precursor exposure and purge time, increasing the number of ALD cycles decreases the water contact angle at the modified surface from hydrophobic to hydrophilic, until the water droplet is completely imbibed by the membrane. To demonstrate the utility of these Janus membranes, a hydrophilic/superaerophobic Janus treatment is shown to greatly reduce the size of air bubbles generated through the membrane, enabling faster mixing. This technique represents the first application of vapor‐deposited covalently bonded metal oxides to form Janus membranes. Further opportunities are afforded by the ability to laterally pattern Al2O3 across the membrane surface via physical masking.

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Section: Resultsmentioning

confidence: 89%

Janus Membranes via Diffusion‐Controlled Atomic Layer Deposition

Waldman

Yang

Mandia

et al. 2018

Adv Materials Inter

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“…58 The slow gradual decrease in the contact angles on the thermal ALD lms with ALD cycles suggest that the lms grew by islandlike growth mechanism. 59,60 In contrast, when the ALD reactions were assisted by UV irradiation, the contact angle of water on the Al 2 O 3 deposited PET surface drops to a stationary level aer only ve ALD cycles, indicating layer-by-layer lm growth. Further, microscopic surface analysis of the Al 2 O 3 lm on PET substrate, deposited by 100 cycles of ALD with a thickness of approximately 10 nm, was performed using AFM.…”

Section: Ald Growth Of Al 2 O 3 Thin Lm On Pet Substrate Under Uv Irmentioning

confidence: 99%

UV-enhanced atomic layer deposition of Al₂O₃ thin films at low temperature for gas-diffusion barriers

et al. 2017

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“…Among those, atomic layer deposition (ALD) was found to excel, mainly because it is based on sequential self-limiting reactions, thus providing uniformity and conformality of the coating across the substrate area, combined with the ability for deposition at temperatures suitable for polymer substrates. [36][37][38][39][40] Up to date, only a handful of ALD deposited PLA-based systems are considered in literature, which involve aluminum oxide (Al 2 O 3 ), [41][42][43][44][45] titanium oxide (TiO 2 ), 46 and zinc oxide (ZnO) 47,48 as the inorganic coating.…”

Section: Introductionmentioning

confidence: 99%

Atomic layer deposition of ZnO on PLA/TiO₂ bionanocomposites: Evaluation of surface chemistry and physical properties toward food packaging applications

Barmpaki

Zavvou

Drivas

et al. 2023

J of Applied Polymer Sci

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The impact of titanium dioxide (TiO2) on the physical properties of poly(lactic acid) (PLA) is explored, along with the combined effect of Atomic Layer Deposition of zinc oxide (ZnO) on the nanocomposite films' surface. PLA/TiO2 bionanocomposites are prepared via melt‐extrusion and characterized in terms of their morphological, thermal, and mechanical properties. Homogeneous dispersion of the filler offers enhanced mechanical performance for samples up to 5 wt% in TiO2 content. Thermal stability of PLA is also slightly improved upon increasing TiO2 content. This work also demonstrates that surface modification of PLA/TiO2 films employing Atomic Layer Deposition of zinc oxide enhances hydrophobicity, while antimicrobial activity, although mild, appears enhanced for coated samples. Water vapor permeability is retained in both coated and uncoated nanocomposites. Surface characterization of the studied specimens, by x‐ray photoelectron spectroscopy and scanning electron microscopy, reveals subsurface diffusion and reaction of the depositing compounds within PLA, leading to a different surface chemistry involving Zn(OH)2. This study gives valuable insights on the parameters affecting the atomic layer deposition of inorganic coatings on a polymeric substrate in the presence of nanoinclusions and, therefore, on the physical properties of the coated films, providing the pathway for their exploitation in food packaging applications.

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Growth of thin Al2O3 films on biaxially oriented polymer films by atomic layer deposition

Cited by 17 publications

References 28 publications

Janus Membranes via Diffusion‐Controlled Atomic Layer Deposition

Janus Membranes via Diffusion‐Controlled Atomic Layer Deposition

UV-enhanced atomic layer deposition of Al₂O₃ thin films at low temperature for gas-diffusion barriers

Atomic layer deposition of ZnO on PLA/TiO₂ bionanocomposites: Evaluation of surface chemistry and physical properties toward food packaging applications

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Growth of thin Al2O3 films on biaxially oriented polymer films by atomic layer deposition

Cited by 17 publications

References 28 publications

Janus Membranes via Diffusion‐Controlled Atomic Layer Deposition

Janus Membranes via Diffusion‐Controlled Atomic Layer Deposition

UV-enhanced atomic layer deposition of Al2O3 thin films at low temperature for gas-diffusion barriers

Atomic layer deposition of ZnO on PLA/TiO2 bionanocomposites: Evaluation of surface chemistry and physical properties toward food packaging applications

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Product

Resources

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UV-enhanced atomic layer deposition of Al₂O₃ thin films at low temperature for gas-diffusion barriers

Atomic layer deposition of ZnO on PLA/TiO₂ bionanocomposites: Evaluation of surface chemistry and physical properties toward food packaging applications