About the internal pressure in cavities derived from implantation-induced blistering in semi-conductors J. Appl. Phys. 110, 114903 (2011) Silicon nanocrystals doped with substitutional or interstitial manganese Appl. Phys. Lett. 99, 193108 (2011) Effect of tin doping on oxygen-and carbon-related defects in Czochralski silicon J. Appl. Phys. 110, 093507 (2011) Ion-beam mixing in crystalline and amorphous germanium isotope multilayers This paper investigates the importance of incomplete ionization of dopants in compensated p-type Si and its impact on the majority-carrier density and mobility and thus on the resistivity. Both theoretical calculations and temperature-dependent Hall-effect measurements demonstrate that the carrier density is more strongly affected by incomplete ionization in compensated Si than in uncompensated Si with the same net doping. The previously suggested existence of a compensation-specific scattering mechanism to explain the reduction of mobility in compensated Si is shown not to be consistent with the T-dependence of the measured carrier mobility. The experiment also shows that, in the vicinity of 300 K, the resistivity of compensated Si has a much weaker dependence on temperature than that of uncompensated silicon.