Harvesting Energy from Vibrations by a Micromachined Electret Generator

Sterken, Tom; Fiorini, Paolo; Altena, G.; Hoof, Chris Van; Puers, Robert

doi:10.1109/sensor.2007.4300088

Cited by 59 publications

(48 citation statements)

References 3 publications

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“…These types of power supplies generate electricity by transferring charges through a vibrationdriven capacitance variance [62][63][64]. To support power generation, the capacitors must have constant charge during the time; hence, a polarization source must be available to generate additional power [52].…”

Section: Electrostatic Vibration-to-electricity Conversionmentioning

confidence: 99%

MRI-based communication for untethered intelligent medical microrobots

Sharafi

Olamaei

2015

J Micro-Bio Robot

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Section: Electrostatic Vibration-to-electricity Conversionmentioning

confidence: 99%

MRI-based communication for untethered intelligent medical microrobots

Sharafi

Olamaei

2015

J Micro-Bio Robot

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“…The 1530-437X/$26.00 © 2010 IEEE capacitors are polarized by a dc voltage source. In a practical application, the polarization can be achieved using permanently charged electrets, which remove the need for an external bias voltage, as illustrated in [12], [13]. Also, an electrets-free power harvester has been proposed by using an inductive fly-back circuit returning part of harvested charge back to the bias capacitor [14].…”

Section: Designmentioning

confidence: 99%

A 2-DOF MEMS Ultrasonic Energy Harvester

2011

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Abstract-This paper reports a novel ultrasonic-based wireless power transmission technique that has the potential to drive implantable biosensors. Compared with commonly used radio-frequency (RF) radiation methods, the ultrasonic power transmission is relatively safe for the human body and does not cause electronic interference with other electronic circuits. To extract ambient kinetic energy with arbitrary in-plane motion directions, a novel 2-D MEMS power harvester has been designed with resonance frequencies of 38 520 and 38 725 Hz. Frequency-response characterization results verify that the device can extract energy from the directions of X, Y, and diagonals. Working in the diagonal direction, the device has a bandwidth of 302 Hz, which is twice wider than a comparable 1-D resonator device. A 1-F storage capacitor is charged up from 0.51 to 0.95 V in 15 s, when the harvester is driven by an ultrasonic transducer at a distance of 0.5 cm in the X-direction, and is biased by 60 Vdc, indicating the energy harvesting capability of 21.4 nW in the X-direction. When excited along the Y-axis, the harvester has an energy-harvesting capacity of 22.7 nW. The harvester was modeled and simulated using an equivalent electrical circuit model in Saber, and the simulation results showed good agreement with the experimental results. The ultrasonic energy harvesting was also investigated using a 1-D piezoelectric micro-cantilever.Index Terms-Energy harvester, implantable biosensor, microelectromechanical system (MEMS), ultrasonic transmission.

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“…The capacitors are polarized by a 100-V dc-voltage source. In a practical application, the polarization can be achieved using permanently charged electrets, which remove the need for an external bias voltage [9], [10].…”

Section: Design and Fabricationmentioning

confidence: 99%

Ultrasonic Energy Transmission and Conversion Using a 2-D MEMS Resonator

Zhu

Moheimani

Yuce

2010

IEEE Electron Device Lett.

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Abstract-This letter reports a novel ultrasonic-based method to power biosensors. Compared with commonly used radiofrequency radiation methods, ultrasonic power transmission is relatively safe for the human body and does not cause electronic interference. To extract ambient kinetic energy with arbitrary motion directions, a novel 2-D microelectromechanical systems energy converter is designed with resonance frequencies of 38520 and 38725 Hz. Working in the diagonal direction, the device has a bandwidth of 302 Hz, which is twice wider than that of a comparable 1-D resonator device. A storage capacitor is charged up to 0.95 V in 15 s, when the converter is driven by an ultrasonic transducer at a distance of 0.5 cm, indicating the energy-conversion capability of 21.4 nW.Index Terms-Energy converter, implantable biosensor, microelectromechanical systems (MEMS), ultrasonic transmission.

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Harvesting Energy from Vibrations by a Micromachined Electret Generator

Cited by 59 publications

References 3 publications

MRI-based communication for untethered intelligent medical microrobots

MRI-based communication for untethered intelligent medical microrobots

A 2-DOF MEMS Ultrasonic Energy Harvester

Ultrasonic Energy Transmission and Conversion Using a 2-D MEMS Resonator

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