2021
DOI: 10.1088/2631-7990/abc673
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Helium-ion-beam nanofabrication: extreme processes and applications

Abstract: Helium ion beam (HIB) technology plays an important role in the extreme fields of nanofabrication. This paper reviews the latest developments in HIB technology as well as its extreme processing capabilities and widespread applications in nanofabrication. HIB-based nanofabrication includes direct-write milling, ion beam-induced deposition, and direct-write lithography without resist assistance. HIB nanoscale applications have also been evaluated in the areas of integrated circuits, materials sciences, nano-opti… Show more

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Cited by 49 publications
(28 citation statements)
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“…According to TEM results, the chemical composition of SEI is measured via XPS with an Ar + sputtering in depth [ 41 ]. Figure 8 a, b shows the changes of C 1 s , O 1 s , F 1 s , and S 2 p in the SEI films of Sb 2 S 3 and Sb 2 S 3 @0.1CDs, respectively, with the increased sputtering time.…”
Section: Resultsmentioning
confidence: 99%
“…According to TEM results, the chemical composition of SEI is measured via XPS with an Ar + sputtering in depth [ 41 ]. Figure 8 a, b shows the changes of C 1 s , O 1 s , F 1 s , and S 2 p in the SEI films of Sb 2 S 3 and Sb 2 S 3 @0.1CDs, respectively, with the increased sputtering time.…”
Section: Resultsmentioning
confidence: 99%
“…98 Similar considerations apply also for techniques using different ion beams, such as the one based on helium. 99 This method was recently employed for creating single and double vacancies in graphene, 100 as well as small defects of the order of 0.5 nm in transition metal dichalcogenides. 101 Alternatively, short QDs operating in the Coulomb blockade regime can be generated by controlled kinks produced by an AFM tip, 23 or usual contact Schottky barriers.…”
Section: Discussionmentioning
confidence: 99%
“…The list of referenced works is certainly not exhaustive in this extensive and rapidly evolving field. For previous reviews, the reader is referred to [9][10][11][12][13].…”
Section: Introductionmentioning
confidence: 99%