Helium ion microscopy

Hlawacek, Gregor; Veligura, Vasilisa; Gastel, Raoul van; Poelsema, Bene

doi:10.1116/1.4863676

Cited by 213 publications

(162 citation statements)

References 141 publications

(154 reference statements)

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“…In Flame1.75, the soot concentration was very low and the sampling was taken at 12 mm only. The collected samples were analyzed by a helium-ion microscope (Carl Zeiss Orion Plus) (Hlawacek and G€ olzh€ auser 2016). This microscope focuses helium ions onto the specimen and scans the beam over the sample.…”

Section: Himmentioning

confidence: 99%

Investigation of the size of the incandescent incipient soot particles in premixed sooting and nucleation flames of n-butane using LII, HIM, and 1 nm-SMPS

Betrancourt

Liu

Desgroux

et al. 2017

Aerosol Science and Technology

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(2017) Investigation of the size of the incandescent incipient soot particles in premixed sooting and nucleation flames of nbutane using LII, HIM, and 1 nm-SMPS, Aerosol Science and Technology, 51:8, 916-935, DOI: 10.1080/02786826.2017 Laser-induced incandescence (LII) measurements were conducted to explore the ability of LII to detect small soot particles of less than 10 nm in two sooting flat premixed flames of n-butane: a socalled nucleation flame obtained at a threshold equivalence ratio F D 1.75, in which the incipient soot particles undergo only minor soot surface growth along the flame, and a more sooting flame at F D 1.95. Size measurements were obtained by modeling the time-resolved LII signals detected using 1064 nm laser excitation. Spectrally-resolved LII signals collected in the nucleation flame display a similar blackbody-like behavior as mature soot. Soot particle temperature was determined from spectrally-resolved detection. LII modeling was conducted using parameters either relevant to those of mature soot or derived from fitting the modeled results to the experimental LII data. Particle size measurements were also carried out using (1) ex situ analysis by helium-ion microscopy (HIM) of particles sampled thermophoretically and (2) online size distribution analysis of microprobe-sampled particles using a 1 nm-SMPS. The size distributions of the incipient soot particles, found in the nucleation flame and in the early soot region of the F D 1.95 flame, derived from time-resolved LII signals are in good agreement with HIM and 1 nm-SMPS measurements and are in the range of 2-4 nm. The thermal and optical properties of incipient soot were found to be not radically different from those of mature soot commonly used in LII modeling. This explains the ability of incipient soot particles to produce continuous thermal emissions in the visible spectrum. This study demonstrates that LII is a promising in situ optical particle sizing technique that is capable of detecting incipient soot as small as about 2.5 nm and potentially 2 nm and resolving small changes in soot sizes below 10 nm.

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Section: Himmentioning

confidence: 99%

Investigation of the size of the incandescent incipient soot particles in premixed sooting and nucleation flames of n-butane using LII, HIM, and 1 nm-SMPS

Betrancourt

Liu

Desgroux

et al. 2017

Aerosol Science and Technology

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“…The in-house research is focused on the development of new analytical methods, instrumentation for in-situ experiments and the investigation of new ion sources (Bischo et al, 2016). Furthermore, these methods and procedures are used to investigate a wide range of ion material interactions in the fundamental as well as applied part of materials research (Hlawacek et al, 2014;Philipp & Bischo , 2012). Recent projects include the fabrication of arbitrary sized nano-magnets using low-uence focused Ne + ion irradiation.…”

Section: Focused Ion Beam Techniquesmentioning

confidence: 99%

Ibc - Ion Beam Center

Borany

Facsko

Weissig

2017

JLSRF

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In the Ion Beam Center (IBC), various set-ups -electrostatic accelerators, ion implanters, plasma-based ion implantation equipment, low-energy ion tools, an ion microscope etc. -are combined into a unique facility for research and applications using ion beams. Almost all ions from stable chemical nuclides are available in the ion energy range from 10 eV to about 60 MeV. In addition to broad beams, also focused (down to 1 nm) and highly-charged (charge state up to 45 + ) ion beams, or ions extracted from a plasma can be provided. In total, the IBC operates more than 30 dedicated tools or beamline end-stations. The speci c expertise of IBC is the modi cation and analysis of solids by energetic ions aimed to develop novel materials for information technology, electronics or energy systems. In addition, ion beam analysis techniques became of increasing importance for interdisciplinary elds like geochemistry, climate or environmental research and resources technology. Special add-on services o ered ensure a successful realization of user experiments. Based on a long-term expertise, speci c equipment and common commercial procedures, the IBC is strongly active in the use of ion beam techniques for industrial applications aimed to initiate valuable product innovation.

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mentioning

confidence: 99%

“…At beam energies of 35 keV helium ions do not lead to the emission of characteristic X-rays from a sample. While some compositional information can be obtained from back scattered helium [2], identifying elemental information is more difficult due to the multiple collisions that occur at energies below 100 keV [3].In this paper we present the latest results from a prototype Secondary Ion Mass Spectrometry (SIMS) system specifically designed for the Zeiss ORION NanoFab HIM [4][5][6]. As the probe size of the HIM is below the lateral information limit in SIMS, the lateral resolution is only limited by the probe-sample interactions and not (as in commercial SIMS instruments) the probe size.…”

mentioning

confidence: 99%

HIM-SIMS: Correlative SE/Chemical Imaging at the Limits of Resolution.

2017

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Techniques for nano-metrology and nano-analyisis are crucial for the ongoing investigation of nanoscale processes in disciplines from materials to life sciences. The Helium Ion Microscope (HIM) has become an ideal tool for imaging and nano-patterning [1]. Imaging with helium and neon ions leads respectively to resolutions of 0.5 nm and ~2 nm for SE based imaging, while structures with sub 20 nm feature sizes may be patterned using Ne. Despite these advantages, the analysis capability of the instrument is currently limited. At beam energies of 35 keV helium ions do not lead to the emission of characteristic X-rays from a sample. While some compositional information can be obtained from back scattered helium [2], identifying elemental information is more difficult due to the multiple collisions that occur at energies below 100 keV [3].In this paper we present the latest results from a prototype Secondary Ion Mass Spectrometry (SIMS) system specifically designed for the Zeiss ORION NanoFab HIM [4][5][6]. As the probe size of the HIM is below the lateral information limit in SIMS, the lateral resolution is only limited by the probe-sample interactions and not (as in commercial SIMS instruments) the probe size. Further, the in-situ combination of sub-nanometer resolution SE images with ultra-high resolution SIMS images, produces a step change in the information obtained from a single sample analysis: While secondary electron imaging on the HIM yields topographical information on the nanometre and even sub nanometer scale, SE imaging alone is not enough to obtain a deep understanding of the sample. SIMS imaging provides an elemental mapping capability, however as the yield of secondary ions is much lower than the one of electrons and the emission area is much larger, the resolution obtainable is limited to a few tens of nanometers. SIMS images often produce hot spots of a few pixels in size that are statistically significant due to the low background of SIMS (<< 1 cps) but yield little information about the size and morphology of the underlying structures that give rise to the signal. By combining both types of information, features too small to be adequately resolved in SIMS may be investigated by SE imaging and the two images sets co-registered and overlayed or fused [7,8]. By combining these two techniques in-situ, artefacts due to contamination or sample modification during transfer between instruments may be avoided. The speed at which it is possible to switch between SIMS and SE imaging in our system (the fastest switch can be made in as little as a few seconds) opens the possibility for entirely new correlative workflows to be developed. Figure 1 shows a correlative study of a lithium titanate and magnesium oxide nanoparticle mixture. Not only do the SIMS maps present the highest resolution SIMS data known to the authors (75-25% edge resolutions of just 10 nm have been obtained), the correlation of SIMS images with SE images allows individual nanoparticle clusters to be unambiguously identified. As SIMS is capa...

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Helium ion microscopy

Cited by 213 publications

References 141 publications

Investigation of the size of the incandescent incipient soot particles in premixed sooting and nucleation flames of n-butane using LII, HIM, and 1 nm-SMPS

Investigation of the size of the incandescent incipient soot particles in premixed sooting and nucleation flames of n-butane using LII, HIM, and 1 nm-SMPS

Ibc - Ion Beam Center

HIM-SIMS: Correlative SE/Chemical Imaging at the Limits of Resolution.

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