Hermetically encapsulated differential resonant accelerometer

Christensen, David L.; Ahn, Chang-Nam; Hong, Vu A.; Ng, Eldwin J.; Yang, Yushi; Lee, B. J.; Kenny, Thomas W.

doi:10.1109/transducers.2013.6626839

Cited by 13 publications

(3 citation statements)

References 8 publications

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“…[307] As stated in the previous sections, frequency shift-based 1D of devices can be implemented in a wide range of applications such as functionalized resonators for mass sen sing [42,43,296,297,[308][309][310][311][312][313] in order to measure extremely small variations in mechanical parameters, which have special benefits for chemical and biomedical detection. [45,46,59,[61][62][63][64]307] Due to simple mechanical design, these resonators have been widely used in accelerometers, [29,314,315] strain sensors, [298,316,317] pressure sensors, [318] as well as measuring force and displacement. [52,54,[319][320][321][322] To date, many efforts have been performed to improve the performance of this type of M/NEMS resonators.…”

Section: Frequency Shift-based Single Micro/nanoresonators With 1dofmentioning

confidence: 99%

A Comprehensive Categorization of Micro/Nanomechanical Resonators and Their Practical Applications from an Engineering Perspective: A Review

Ghaemi

Nikoobin

Ashory

2022

Adv Elect Materials

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Micro/nanoelectromechanical systems (M/NEMS), especially micro/nanomechanical resonators, provide an unprecedented platform for investigating a wide range of applications in both fundamental physical phenomena (such as quantum‐level problems) and engineering and applied sciences (like sensing physical quantities and signal processing). In sensing context, these tiny resonators are invaluable tools for detecting weak forces and single molecules. Measuring such small variations in sub‐nanometer amplitudes at high frequencies has created many practical challenges. Therefore, maximizing the responsivity to a specified input parameter and minimizing the responsivity to other inputs such as noise are considered as the optimal design for the excellent performance in nanoresonators. The present review aims to summarize some of the recent progress in this rapidly advancing field. Specifically, more attention is paid to the topics related to the dynamical behaviors of micro/nanoresonator and their practical applications. First, the theory behind micro/nanoresonators is described. Then a summary is presented of the basic concepts in resonant devices. In addition, several commonly dynamical techniques to enhance sensitivity are introduced. Finally, the devices are classified based on linear and nonlinear, single and array, symmetric and asymmetric, and frequency shift‐based and amplitude shift‐based resonators, along with the relative advantages and disadvantages of each one in engineering applications.

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Section: Frequency Shift-based Single Micro/nanoresonators With 1dofmentioning

confidence: 99%

A Comprehensive Categorization of Micro/Nanomechanical Resonators and Their Practical Applications from an Engineering Perspective: A Review

Ghaemi

Nikoobin

Ashory

2022

Adv Elect Materials

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“…Over the past decades, micro-electromechanical systems (MEMS)-based sensors have proven high reliability, low power consumption, and ease of integration, possibly becoming the most suitable candidate for ultrasensitive sensors [1]. The small size and high sensitivity of MEMS sensors allow their integration in a wide range of potential applications, including gyroscopes [2][3][4], accelerometers [5][6][7], mass sensors [8][9][10], and gas sensors [11][12][13].…”

Section: Introductionmentioning

confidence: 99%

A multi-sensing scheme based on nonlinear coupled micromachined resonators

et al. 2023

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A new multi-sensing scheme via nonlinear weakly coupled resonators is introduced in this paper, which can simultaneously detect two different physical stimuli by monitoring the dynamic response around the first two lowest modes. The system consists of a mechanically coupled bridge resonator and cantilever resonator. The eigenvalue problem is solved to identify the right geometry for the resonators to optimize their resonance frequencies based on mode localization in order to provide outstanding sensitivity. A nonlinear equivalent model is developed using the Euler–Bernoulli beam theory while accounting for the geometric and electrostatic nonlinearities. The sensor's dynamics are explored using a reduced-order model based on two-mode Galerkin discretization, which reveals the richness of the response. To demonstrate the proposed sensing scheme, the dynamic response of the weakly coupled resonator is investigated by tuning the stiffness and mass of the bridge and cantilever resonators, respectively. With its simple and scalable design, the proposed system shows great potential for intelligent multi-sensing detection in many applications.

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“…In the past two decades, single-resonator-based (SRB) Micro-Electro-Mechanical-Systems (MEMS) sensors have been extensively studied for detecting small physical or chemical perturbations, such as pressure [1][2][3][4][5][6][7][8], rotational rate [9][10][11][12][13][14], acceleration [15][16][17], vibration [18][19][20], force [21][22][23], chemical vapor [24][25][26], and biological material [27][28][29][30][31][32][33][34]. Various structures, such as flexural mode resonators (FMR) [28,31,35], surface acoustic wave resonators (SAW) [36], bulk acoustic resonators (BAR) [6,12,[24][25][26]37], lamb wave resonators (LWR) [8,14,38], etc., have been fabricated to enable these SRB sensors to ha...…”

Section: Introductionmentioning

confidence: 99%

Dual-Resonator-Based (DRB) and Multiple-Resonator-Based (MRB) MEMS Sensors: A Review

et al. 2021

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Single-resonator-based (SRB) sensors have thrived in many sensing applications. However, they cannot meet the high-sensitivity requirement of future high-end markets such as ultra-small mass sensors and ultra-low accelerometers, and are vulnerable to environmental influences. It is fortunate that the integration of dual or multiple resonators into a sensor has become an effective way to solve such issues. Studies have shown that dual-resonator-based (DRB) and multiple-resonator-based (MRB) MEMS sensors have the ability to reject environmental influences, and their sensitivity is tens or hundreds of times that of SRB sensors. Hence, it is worth understanding the state-of-the-art technology behind DRB and MRB MEMS sensors to promote their application in future high-end markets.

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Hermetically encapsulated differential resonant accelerometer

Cited by 13 publications

References 8 publications

A Comprehensive Categorization of Micro/Nanomechanical Resonators and Their Practical Applications from an Engineering Perspective: A Review

A Comprehensive Categorization of Micro/Nanomechanical Resonators and Their Practical Applications from an Engineering Perspective: A Review

A multi-sensing scheme based on nonlinear coupled micromachined resonators

Dual-Resonator-Based (DRB) and Multiple-Resonator-Based (MRB) MEMS Sensors: A Review

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