High Accuracy Pressure Sensor Using Quartz Dual Tuning Fork Resonator

Watanabe, Jun; Sakurai, Toshinobu; Saito, Y.; Sato, Kenta

doi:10.1541/ieejeiss.131.1101

Cited by 3 publications

(5 citation statements)

References 6 publications

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“…c Photograph of the tuning fork prototype 65 . d Packaged pressure sensor prototype with a tuning fork and stainless-steel package 68 , 69 . e Photograph of the EPSON quartz pressure sensor 69 .…”

Section: Rpsmentioning

confidence: 99%

“…d Packaged pressure sensor prototype with a tuning fork and stainless-steel package 68 , 69 . e Photograph of the EPSON quartz pressure sensor 69 . f Overall structural diagram of a flexible hinge lever 70 .…”

Section: Rpsmentioning

confidence: 99%

“…The quartz RPS designed by Ren 68 (depicted in Fig. 4d ) and the Epson Company 69 (illustrated in Fig. 4e ) feature a metal base and tuning fork resonator.…”

Section: Rpsmentioning

confidence: 99%

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Advances in high-performance MEMS pressure sensors: design, fabrication, and packaging

Han,

Huang,

et al. 2023

Microsyst Nanoeng

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Pressure sensors play a vital role in aerospace, automotive, medical, and consumer electronics. Although microelectromechanical system (MEMS)-based pressure sensors have been widely used for decades, new trends in pressure sensors, including higher sensitivity, higher accuracy, better multifunctionality, smaller chip size, and smaller package size, have recently emerged. The demand for performance upgradation has led to breakthroughs in sensor materials, design, fabrication, and packaging methods, which have emerged frequently in recent decades. This paper reviews common new trends in MEMS pressure sensors, including minute differential pressure sensors (MDPSs), resonant pressure sensors (RPSs), integrated pressure sensors, miniaturized pressure chips, and leadless pressure sensors. To realize an extremely sensitive MDPS with broad application potential, including in medical ventilators and fire residual pressure monitors, the “beam-membrane-island” sensor design exhibits the best performance of 66 μV/V/kPa with a natural frequency of 11.3 kHz. In high-accuracy applications, silicon and quartz RPS are analyzed, and both materials show ±0.01%FS accuracy with respect to varying temperature coefficient of frequency (TCF) control methods. To improve MEMS sensor integration, different integrated “pressure + x” sensor designs and fabrication methods are compared. In this realm, the intercoupling effect still requires further investigation. Typical fabrication methods for microsized pressure sensor chips are also reviewed. To date, the chip thickness size can be controlled to be <0.1 mm, which is advantageous for implant sensors. Furthermore, a leadless pressure sensor was analyzed, offering an extremely small package size and harsh environmental compatibility. This review is structured as follows. The background of pressure sensors is first presented. Then, an in-depth introduction to MEMS pressure sensors based on different application scenarios is provided. Additionally, their respective characteristics and significant advancements are analyzed and summarized. Finally, development trends of MEMS pressure sensors in different fields are analyzed.

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Section: Rpsmentioning

confidence: 99%

Section: Rpsmentioning

confidence: 99%

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Advances in high-performance MEMS pressure sensors: design, fabrication, and packaging

Han,

Huang,

et al. 2023

Microsyst Nanoeng

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“…Epson has developed a resonant pressure sensor product with a quartz tuning fork as the resonant unit, a metal corrugated tube as the pressure conversion unit, and a flexible rod [ 12 ]. The above products are widely used in the field of deep-sea exploration to measure sea depth and sea pressure and can also be used to predict or study tsunamis, tides, submarine volcanos, and other phenomena [ 13 ]. However, the existing pressure conversion units of such products have multiple structural assembly problems, which will inevitably bring negative factors such as residual stress and small gaps caused by assembly, welding, etc., in the preparation process, affecting the performance of the sensors.…”

Section: Introductionmentioning

confidence: 99%

A High-Precision Quartz Resonant Ultra-High Pressure Sensor with Integrated Pressure Conversion Structure

Zhang,

Li,

et al. 2023

Micromachines

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A quartz resonant pressure sensor is proposed for high-precision measurement of ultra-high pressure. The resonant unit realizes a push–pull differential layout, which restrains the common-mode interference factor, and the resonator is only subject to axial force. The pressure conversion unit is made in an integrated manner, avoiding output drift problems caused by residual stress and small gaps during assembly, welding, and other processes in sensor preparation. Theoretical and simulation analysis was conducted on the overall design scheme of the sensor in this paper, verifying the feasibility. Sensor prototypes were created and performance experiments were conducted. The experimental results show that the sensitivity of the ultra-high pressure sensor is 46.32 Hz/MPa at room temperature within the pressure range of 120 MPa, and the comprehensive accuracy is 0.0266%. The comprehensive accuracy of the sensor is better than 0.0288% FS in the full temperature range environment. This proves that the sensor scheme is suitable for high-precision and high-stability detection of ultra-high pressure, providing new solutions in special pressure measurement fields such as deep-sea and oil exploration.

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“…So far, quartz resonators have already been employed in pressure sensing application. Typically, those resonant pressure sensors were implemented by incorporating quartz tuning forks with metal bellows and flexure hinge [10]. Another approach was an adoption of all-quartz structure that worked in the thickness-shear mode [11].…”

Section: Introductionmentioning

confidence: 99%

Modelling and characterisation of a micromachined resonant pressure sensor with piezoelectric excitation and sensing

Cheng

Zhao

et al. 2016

Micro & Nano Letters

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A resonant pressure sensor with piezoelectric excitation and sensing is presented, which is realised by combining a micromachined diaphragm and a quartz resonator. The sensor performance is improved by introducing double enhancement beams into the diaphragm. Finite element method is utilised to reveal the validity and optimise the structural dimensions. A self-excitation circuit is designed to drive the resonator into steady oscillation. The sensor chip is fabricated by bulk micromachining technologies and packaged in a metal shell in the inert gas environment for characterisation. The performance characteristics including the short-term drift, temperature characteristic and quality factor are investigated. The experimental results demonstrate that the sensor features a high sensitivity of 100.45 Hz/kPa and a short-term drift <14 ppm in the operating range of −10∼10 kPa at room temperature. Owing to the excellent performance in sensitivity and accuracy, the sensor can be applied for micropressure measurement.

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High Accuracy Pressure Sensor Using Quartz Dual Tuning Fork Resonator

Cited by 3 publications

References 6 publications

Advances in high-performance MEMS pressure sensors: design, fabrication, and packaging

Advances in high-performance MEMS pressure sensors: design, fabrication, and packaging

A High-Precision Quartz Resonant Ultra-High Pressure Sensor with Integrated Pressure Conversion Structure

Modelling and characterisation of a micromachined resonant pressure sensor with piezoelectric excitation and sensing

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