We have developed a quartz pressure sensor for measuring with high accuracy. This sensor uses a dual tuning fork resonator which has frequency change by stress. Frequency change for full scale (FS) is about 10% on the basis of unloaded frequency. This sensor is good repeatability and hysteresis characteristics which is 0.005% FS and 0.008% FS respectively. In addition, pressure transducer are all fabricated by quartz through the technology of photolithography. Indeed, microprocessor-based measuring system is available with high speed counter timer to measure transducer's frequency and to compensate transducer's temperature characteristics and linearity.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.