High aspect-ratio low-noise multi-axis accelerometers made from thick silicon

Tang, Yemin; Najafi, K.

doi:10.1109/isiss.2016.7435562

Cited by 12 publications

(2 citation statements)

References 5 publications

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“…This is relevant in order to obtain high quality factors and thus highperformance inertial sensors. Additional custom processes developed in various laboratories are worth to be mentioned: ultra-high-quality factors are obtained at University of California, Irvine [27]; nano-gap processes have been developed for years at the Georgia Institute of Technology [28], among others; high-aspect-ratio processes were developed at University of Michigan [29] and again at the Georgia Institute of Technology; piezoresistive nano-gauge processes were concevied at CEA-Leti [22]. CMOS-MEMS processes were developed at Carnegie-Mellon University [30], among others.…”

Section: Brief Overview Of Fabrication Technologiesmentioning

confidence: 99%

Silicon MEMS inertial sensors evolution over a quarter century

Langfelder

Bestetti

Gadola

2021

J. Micromech. Microeng.

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Silicon-based microelectromechanical systems (MEMS) inertial sensors have become ubiquitous, revolutionizing motion sensing, vibration sensing and accurate positioning in several societal fields. Driven by consumer and automotive markets, companies involved in this technological development focused mostly on low cost, miniaturization and low power consumption, somewhat sacrificing measurement accuracy. In several laboratories all over the world, however, the research toward higher-performance sensors has been going on for more than two decades, with the goal of improving two key parameters for future applications: noise density and bias stability. This review article summarizes, for silicon-based MEMS accelerometers and gyroscopes, the most relevant working principles that appeared in the scientific literature. The collection of several data about the above mentioned key figures enables tracing the roadmap for further developments in the upcoming decade.

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Section: Brief Overview Of Fabrication Technologiesmentioning

confidence: 99%

Silicon MEMS inertial sensors evolution over a quarter century

Langfelder

Bestetti

Gadola

2021

J. Micromech. Microeng.

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“…Inspired by the principles of insect bionics, many institutes have researched hair biomimetic micro-inertial sensors in order to meet the application requirements in insect-scale MAS [10]. Several groups have successfully developed biomimetic hair acceleration sensors with a differential capacitive transformation [11,12]. Simultaneously, a bionic micro-gyroscope with the piezoelectric drive was researched for the motion control of future mm scale micro aerial vehicle (MAV) [13].…”

Section: Introductionmentioning

confidence: 99%

Design and Analysis of a New Hair Sensor for Multi-Physical Signal Measurement

Yang

2016

Sensors

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Abstract:A new hair sensor for multi-physical signal measurements, including acceleration, angular velocity and air flow, is presented in this paper. The entire structure consists of a hair post, a torsional frame and a resonant signal transducer. The hair post is utilized to sense and deliver the physical signals of the acceleration and the air flow rate. The physical signals are converted into frequency signals by the resonant transducer. The structure is optimized through finite element analysis. The simulation results demonstrate that the hair sensor has a frequency of 240 Hz in the first mode for the acceleration or the air flow sense, 3115 Hz in the third and fourth modes for the resonant conversion, and 3467 Hz in the fifth and sixth modes for the angular velocity transformation, respectively. All the above frequencies present in a reasonable modal distribution and are separated from interference modes. The input-output analysis of the new hair sensor demonstrates that the scale factor of the acceleration is 12.35 Hz/g, the scale factor of the angular velocity is 0.404 nm/deg/s and the sensitivity of the air flow is 1.075 Hz/(m/s) 2 , which verifies the multifunction sensitive characteristics of the hair sensor. Besides, the structural optimization of the hair post is used to improve the sensitivity of the air flow rate and the acceleration. The analysis results illustrate that the hollow circular hair post can increase the sensitivity of the air flow and the II-shape hair post can increase the sensitivity of the acceleration. Moreover, the thermal analysis confirms the scheme of the frequency difference for the resonant transducer can prominently eliminate the temperature influences on the measurement accuracy. The air flow analysis indicates that the surface area increase of hair post is significantly beneficial for the efficiency improvement of the signal transmission. In summary, the structure of the new hair sensor is proved to be feasible by comprehensive simulation and analysis.

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