2003
DOI: 10.1088/0960-1317/13/4/315
|View full text |Cite
|
Sign up to set email alerts
|

High-aspect ratio submicrometer needles for intracellular applications

Abstract: Presented

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
1
1

Citation Types

0
46
0

Year Published

2007
2007
2022
2022

Publication Types

Select...
6
2
1

Relationship

0
9

Authors

Journals

citations
Cited by 58 publications
(46 citation statements)
references
References 10 publications
0
46
0
Order By: Relevance
“…Sharp, microfabricated silicon needles with flexible polyimide-based connection have been developed for intracellular recording and tested in moths and sea slugs (Hanein et al, 2002(Hanein et al, , 2003. These high-aspect probes have submicrometer diameters.…”
Section: Other Silicon-based Arraysmentioning
confidence: 99%
“…Sharp, microfabricated silicon needles with flexible polyimide-based connection have been developed for intracellular recording and tested in moths and sea slugs (Hanein et al, 2002(Hanein et al, , 2003. These high-aspect probes have submicrometer diameters.…”
Section: Other Silicon-based Arraysmentioning
confidence: 99%
“…In order to avoid it, Hanein et al [11] proposed the idea of protecting a main pillar with surrounding sacrificial structures, in a way that they would obstruct the plasma coupling to the bottom of the main electrode and thus avoid the underetch. They also used a second etching step to sharpen the main pillars and get rid of the sacrificial structures; the latter happens naturally as a consequence of the etching process.…”
Section: A Plasma Etchingmentioning
confidence: 99%
“…Microstructures with sharp tips are playing increasingly important roles in many fields, such as probes used in scanning probe microscopy (SPM) [1] and nanolithography [2], microelectrodes used in the neural interfacing [3] and chemical/biological sensing [4,5], microneedles used in drug injection [6], probes in field emission [7] and data storage [8], and so on. These microstructures have many obvious advantages: (1) fine resolution, (2) small invasive effects which are required in many sensing fields, and (3) easy penetration and arrival at the aim points [9].…”
Section: Introductionmentioning
confidence: 99%