This letter describes a new two-step electrode process on p-GaN and characteristics of GaN p-n junction diodes on free-standing GaN substrates with low specific ON-resistance R on and high breakdown voltage V B . We develop a two-step process for anode electrodes in order to avoid plasma damage to the p + -GaN contact layer during the sputtering process. The specific ON-resistance is further improved due to a new low-damage process. The breakdown voltage of the diodes with the field-plate (FP) structure is over 1100 V, and the leakage current was low, i.e., in the range of 10 −9 A. The specific ON-resistance of the diodes of 50 μm in diameter with the FP structure was 0.4 mΩ · cm 2 . Baliga's figure of merit (V 2 B /R on ) of 3.0 GW/cm 2 is obtained. These are the best values ever reported among those achieved by GaN p-n junction diodes on free-standing GaN substrates.Index Terms-Breakdown voltage, gallium nitride, power semiconductor devices.