High frequency broadband PZT thick film ultrasonic transducers for medical imaging applications

Micromoulding of PZT film structures using electrohydrodynamic atomization mould filling

“…[1][2][3][4] Within these applications, lead zirconate titanate (PZT) is an important piezoelectric material because of its high piezoelectric constant, relative permittivity and electromechanical coupling coefficient. 5 Fabrication of such thickness PZT films using current fabrication methods is limited by low deposition rate (physical vapour deposition), 6 high processing temperature (screen printing), 7 and stress generation (sol-gel coating).…”

11F-5 High-Frequency Piezoelectric PZT Film Micromachined Ultrasonic Transducers

“…The transducer has center frequency of 80 MHz and -6 dB bandwidth of 55%. With the Panametrics setting (Energy=1 uJ, Gain=0 dB), the peak to peak value of the echo signal of the new PZT film transducers can be as high as 100 mV, which is much higher than previous PZT film transducers [7][8][9]. On investigation of kerfless PZT arrays is ongoing.…”

Micro-machined high-frequency (80 MHz) PZT thick film linear arrays

“…Recently, piezoelectric films have already been widely used to fabricate micro-scale devices [5]–[8]. Among all piezoelectric films, PZT thick films have been shown to exhibit good dielectric and piezoelectric properties, making them possible ultrasonic transducer material candidates for high-frequency applications via micro-machined technology [9], [10]. Moreover, the use of PZT ceramic, PZT composite, and PZT film for fabricating high-frequency kerfless linear arrays has been reported [11]–[13].…”