High-frequency holographic transmission gratings in photoresist

Enger, Rolf C.; Case, Steven K.

doi:10.1364/josa.73.001113

Cited by 47 publications

(4 citation statements)

References 10 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…C. Enger and S. K. Case [47] created a transmission grating with a grating period of 330 nm, groove depth of 370 nm, and incidence angle of 42 • in 1983. The diffraction efficiency of the transmission grating created by holographic exposure was better than 88% at 632.8 nm.…”

Section: Multilayer Dielectric Film Transmission Gratingmentioning

confidence: 99%

The Development Progress of Surface Structure Diffraction Gratings: From Manufacturing Technology to Spectroscopic Applications

Wang

Chen

et al. 2022

Applied Sciences

View full text Add to dashboard Cite

The high-precision diffraction grating is an important chromatic dispersion component that has been widely used in many fields, including laser beam combining, chirped pulse compression, spectroscopy, among others. In this paper, we review the development status of reflection and transmission gratings with high diffraction efficiency and high laser-induced damage thresholds, such as metal-film and multilayer-dielectric-film gratings. Then, we review the basic principles and most recent stages in the development of manufacturing techniques, such as mechanical scribing, holographic exposure, electron-beam lithography, and nanoimprinting.

show abstract

Section: Multilayer Dielectric Film Transmission Gratingmentioning

confidence: 99%

The Development Progress of Surface Structure Diffraction Gratings: From Manufacturing Technology to Spectroscopic Applications

Wang

Chen

et al. 2022

Applied Sciences

View full text Add to dashboard Cite

show abstract

“…He discovered night-active moths which had broadband antireflective structures on the corneaa survival mechanism optimized by nature making the moths less vulnerable to predators. Since that time different approaches to realize the necessary graded index distribution for broadband impedance matching were described, such as porous layer [22] and direct modification of surface properties {3, 23,6,24] . 'Moth-eye' structures with a period of 220 nm have been produced and also replicated on master plates with a diameter of up to 25 cm.…”

Section: Theorymentioning

confidence: 99%

<title>Single- and zero-order binary phase gratings for visible and UV light</title>

Glaser¹,

Schroeter²,

Poehlmann³

et al. 1997

SPIE Proceedings

View full text Add to dashboard Cite

We will discuss the design of surface structured optical elements (corrugated gratings) in fused quartz for application in the short wavelength range, namely as antireflection surface, as A/4-phase-plate, as polarization beam splitter and as highly efficient phase mask for writing fibre BRAGG gratings in monomode fibres. Experimental results will be presented and are found to be in good agreement with theory.

show abstract

“…Photoresist diffraction gratings have successfully been produced for applications within the electronics industry since the late 1960s [1][2][3][4][5][6][7][8][9][10]. The substrates used are normally glass plates or silicon wafers.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of photoresist diffraction gratings on Ti-6Al-4V beam specimens for use in moiré interferometry

Fellows¹,

Güngör²

1998

Meas. Sci. Technol.

View full text Add to dashboard Cite

Photoresist diffraction gratings of 1200 lines mm-1 were produced directly on Ti-6Al-4V beam specimens to study fatigue crack closure using moiré interferometry. A dyed photoresist was used to overcome the problems of reflection causing standing waves in the photoresist. Dipping was the best method of applying an even layer of photoresist to the specimen. The specimens were manufactured oversize, then machined to size after the gratings had been produced, to remove the bead at the specimen edge. This paper outlines the processes required to produce the photoresist gratings and a brief description of the combined moiré interferometer and fatigue rig used.

show abstract

High-frequency holographic transmission gratings in photoresist

Cited by 47 publications

References 10 publications

The Development Progress of Surface Structure Diffraction Gratings: From Manufacturing Technology to Spectroscopic Applications

The Development Progress of Surface Structure Diffraction Gratings: From Manufacturing Technology to Spectroscopic Applications

<title>Single- and zero-order binary phase gratings for visible and UV light</title>

Fabrication of photoresist diffraction gratings on Ti-6Al-4V beam specimens for use in moiré interferometry

Contact Info

Product

Resources

About