“…In recent years, the silicon nitride (Si 3 N 4 ) platform was developed, which enables waveguide-based excitation and collection of Raman [19,20,21,22] and SERS spectra [23,24,25,26,27,28,29,30,31]. Despite the continuous improvement in the performance of the waveguide-based SERS platforms, they are limited by the background signal of the Si 3 N 4 [32,33]. Currently, free-space SERS substrates still slightly outperform waveguide-based SERS platforms [34].…”