High-Performance SAW Resonator With Simplified LiTaO<sub>3</sub>/SiO<sub>2</sub> Double Layer Structure on Si Substrate

Takai, Tsutomu; Iwamoto, Hideki; Takamine, Yuichi; Fuyutsume, Toshiyuki; Nakao, Takeshi; Hiramoto, Masahiro; Toi, Takanori; Koshino, Masayoshi

doi:10.1109/tuffc.2019.2898046

Cited by 99 publications

(32 citation statements)

References 13 publications

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“…3.5 GHZ center frequency I.H.P. surface acoustic wave resonator, test performance shows low passband loss and good transition band steepness [ 63 ] Then in 2019, the triple-layer LT/SiO 2 /AlN structure was adopted in [ 64 ] to simplify the double-layer structure on the Si substrate. Three-layer structure, simplified structure, compared with standard 42YX-LT substrate, as shown in Figure 4 .…”

Section: Saw Filter Technologymentioning

confidence: 99%

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Development and Application of SAW Filter

Chen

Zhu

2022

Micromachines

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With the in-depth advancement of the fifth generation (5G) mobile communication technology, the technical requirements for filters are also constantly improving. Surface acoustic wave (SAW) filters are widely used in home TV, mobile communications, radio frequency filters and radar due to their simple structure, few mask layers, easy miniaturization, and low cost. Through the continuous improvement of communication technology, SAW has developed into various high-performance acoustic filters from bulk SAW with the support of some new architectures, new materials and advanced modeling techniques. This paper analyzes and reviews the research situation of SAW filter technology.

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Section: Saw Filter Technologymentioning

confidence: 99%

“… The basic structure of I.H.P ( a ) three-layer structure, ( b ) two-layer structure, ( c ) standard 42YX-LT substrate [ 64 ]. © [2019] IEEE.…”

Section: Figurementioning

confidence: 99%

Development and Application of SAW Filter

Chen

Zhu

2022

Micromachines

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“…When silicon substrate is applied as the normal substrate in Fig. 1, piezoelectric layer/ SiO2/ Si structure is similar to Incredible High-performance SAW (I.H.P.SAW) devices [42] and solidly mounted resonator (SMR) [43] which has the ability to confine acoustic wave, to some extent. Simulation results show that the bulk wave can be confined and the signal is as great as conventional SAW devices only if the thicknesses of the piezoelectric layer and SiO2 are proper.…”

Section: Simulation Detailsmentioning

confidence: 99%

3D Layout of Interdigital Transducers for High Frequency Surface Acoustic Wave Devices

Shen

Luo

et al. 2020

IEEE Access

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The development of mobile communication sets higher demands on high frequency surface acoustic wave (SAW) devices. The layout of interdigital transducers (IDT) in SAW devices is in plane and the traditional methods of improving frequency for SAW devices are the increase of acoustic velocity and the reduction of wavelength. However, these methods have a limit due to the limited acoustic velocity and the photolithography limit. This work proposes a new way for the development of high frequency SAW devices by redesigning the layout of IDT in three dimensions (3D). The set of IDTs is split into two layers, i.e. the ground electrodes on one layer and the signal electrodes on the other layer. This 3D layout of IDTs dramatically narrows the horizontal gap between two adjacent electrodes, which can significantly increase the frequency. The frequency and the electromechanical coupling factor (K 2) of the four structures of SAW devices with the 3D layout of IDTs were studied by the finite element method (FEM). The results show that the frequency can be doubled under the same critical resolution of lithography due to the shortening of wavelength, and the 3D layout of IDTs is available for SAW devices based on piezoelectric thin film or piezoelectric single crystal. This work develops a new alternative to increase the working frequency of SAW devices.

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“…However, superconducting filters are hard to employ as general electronic devices because a high-quality cryo-cooler is needed. Surface acoustic waveguide (SAW) filters [4,5,6,7] have good frequency characteristics and are very compact. Therefore, SAW filters are employed in many of the present wireless systems.…”

Section: Introductionmentioning

confidence: 99%

Bandpass filter with flat passband and transmission zeros using parallel-connected resistor loaded hairpin-shaped resonators

Tsukushi

Ono

Wada

2020

IEICE Electron. Express

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A fourth-order flat passband bandpass filter (BPF) is realized using proposed resonators and half-wave open-looped resonators. The fourth-order flat passband BPF is necessary to prepare at least two kinds of resonators that have high and low unloaded quality factors. The proposed resonator is configured based on a half-wave hairpin-shaped resonator with a parallel-connected resistor. It is assigned as a resonator with a low unloaded quality factor. The advantage of the proposed resonator is flexible adjustment of the unloaded quality factor by changing the value and setting position of the resistor. Using equations and electromagnetic simulation, we show that the unloaded quality factor can be controlled by setting the position of the resistor. A half-wave open-looped resonator is assigned as a resonator with a high unloaded quality factor. Furthermore, a fourth-order flat passband BPF with transmission zeros and a flat passband is constructed on a printed circuit board by using the proposed resonators and half-wave open-looped resonators. Flat passband characteristics of a fourthorder BPF is satisfied with the design specifications.

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High-Performance SAW Resonator With Simplified LiTaO₃/SiO₂ Double Layer Structure on Si Substrate

Cited by 99 publications

References 13 publications

Development and Application of SAW Filter

Development and Application of SAW Filter

3D Layout of Interdigital Transducers for High Frequency Surface Acoustic Wave Devices

Bandpass filter with flat passband and transmission zeros using parallel-connected resistor loaded hairpin-shaped resonators

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High-Performance SAW Resonator With Simplified LiTaO3/SiO2 Double Layer Structure on Si Substrate

Cited by 99 publications

References 13 publications

Development and Application of SAW Filter

Development and Application of SAW Filter

3D Layout of Interdigital Transducers for High Frequency Surface Acoustic Wave Devices

Bandpass filter with flat passband and transmission zeros using parallel-connected resistor loaded hairpin-shaped resonators

Contact Info

Product

Resources

About

High-Performance SAW Resonator With Simplified LiTaO₃/SiO₂ Double Layer Structure on Si Substrate