2012
DOI: 10.1117/12.906810
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High pressure annealing of Europium implanted GaN

Abstract: GaN epilayers were implanted with Eu to fluences of 1×1013 Eu/cm 2 and 1×10 15 Eu/cm 2 . Post-implant thermal annealing was performed in ultra-high nitrogen pressures at temperatures up to 1450 ºC. For the lower fluence effective structural recovery of the crystal was observed for annealing at 1000 ºC while optical activation could be further improved at higher annealing temperatures. The higher fluence samples also reveal good optical activation; however, some residual implantation damage remains even for ann… Show more

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Cited by 37 publications
(33 citation statements)
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“…Namely, post implantation high temperature annealing treatments are widely used to recover the crystal structure and to promote the optical activity of the implanted ions. 16,17 In fact, this approach is needed since the optical activity of the implanted RE ions is only achieved by thermal treatments. 18 Additionally, during the implantation the damage can be reduced using implantation angles that allow the channeling of the implanted ions, decreasing the first knock-on collisions or using relatively high temperatures during the process.…”
mentioning
confidence: 99%
“…Namely, post implantation high temperature annealing treatments are widely used to recover the crystal structure and to promote the optical activity of the implanted ions. 16,17 In fact, this approach is needed since the optical activity of the implanted RE ions is only achieved by thermal treatments. 18 Additionally, during the implantation the damage can be reduced using implantation angles that allow the channeling of the implanted ions, decreasing the first knock-on collisions or using relatively high temperatures during the process.…”
mentioning
confidence: 99%
“…Details of the sample preparation can be found in Ref. [13]. One sample was grown and Mg-doped by HVPE prior to implantation/annealing.…”
Section: Methodsmentioning
confidence: 99%
“…Therefore further annealing was performed using high temperature and high pressure (HTHP) at 1250 ºC and 1400 ˚C in a 1.1 GPa N 2 atmosphere for 30 min. The HTHP annealing was performed at UNIPRESS, Poland and suppresses the dissociation of GaN at temperatures well above the MOCVD growth temperature 27,28 .…”
Section: Methodsmentioning
confidence: 99%