High-Pressure High-Temperature Bulk-Type Piezoresistive Pressure Sensor

Chan, Elena; Lin, Dequan; Tang, Zili; Lü, Lei; Chau, Kevin; Wong, Man

doi:10.1109/icsict.2018.8565680

Cited by 1 publication

(1 citation statement)

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“…In the fields of industrial control, aerospace and deep-sea exploration, pressure sensors with a wide measurement range (over several atmospheric pressure) are widely used [ 1 ]. These pressure sensors mainly function with several typical working principles, such as piezoresistive sensing [ 2 , 3 , 4 ], piezoelectric sensing [ 5 , 6 ], capacitive sensing [ 7 , 8 ], fiber optical sensing [ 9 , 10 ] and resonant sensing [ 11 , 12 , 13 , 14 , 15 , 16 , 17 ]. Piezoresistive pressure sensors are widely used in many areas because of significant advantages, including high sensitivities, fast dynamic responses and easy miniaturizations.…”

Section: Introductionmentioning

confidence: 99%

A Resonant Pressure Microsensor with a Wide Pressure Measurement Range

Xiang

Cheng

et al. 2021

Micromachines

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This paper presents a resonant pressure microsensor with a wide range of pressure measurements. The developed microsensor is mainly composed of a silicon-on-insulator (SOI) wafer to form pressure-sensing elements, and a silicon-on-glass (SOG) cap to form vacuum encapsulation. To realize a wide range of pressure measurements, silicon islands were deployed on the device layer of the SOI wafer to enhance equivalent stiffness and structural stability of the pressure-sensitive diaphragm. Moreover, a cylindrical vacuum cavity was deployed on the SOG cap with the purpose to decrease the stresses generated during the silicon-to-glass contact during pressure measurements. The fabrication processes mainly contained photolithography, deep reactive ion etching (DRIE), chemical mechanical planarization (CMP) and anodic bonding. According to the characterization experiments, the quality factors of the resonators were higher than 15,000 with pressure sensitivities of 0.51 Hz/kPa (resonator I), −1.75 Hz/kPa (resonator II) and temperature coefficients of frequency of 1.92 Hz/°C (resonator I), 1.98 Hz/°C (resonator II). Following temperature compensation, the fitting error of the microsensor was within the range of 0.006% FS and the measurement accuracy was as high as 0.017% FS in the pressure range of 200 ~ 7000 kPa and the temperature range of −40 °C to 80 °C.

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