SUMMARYTo design superconducting microwave receivers, the surface resistance of the superconducting thin film must be considered. Therefore, a highly accurate technique for measuring the surface resistance of superconducting thin films should be established. In this paper, we propose a probe-coupled microstrip line resonator as a technique for measuring the surface resistance of superconducting thin films. In the resonator technique, the surface resistance is calculated from Q u , the unloaded Q, of the resonator. Since the microstrip line resonator searches for an accurate surface resistance of the superconducting thin film, establishing a technique that accurately determines the Q u of the resonator is crucial. We measure the Q u values of resonators fabricated from metal and superconducting thin film by a probe-coupled microstrip line resonator and describe the accuracy of Q u measurement by the probe-coupled micro-strip line resonator and the repeatability of the surface resistance measurement of a superconducting thin film.